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Marinus Johannes Maria Van Dam
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Venlo, NL
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last 30 patents
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Patent Grant
Device manufacturing method and lithographic apparatus,and computer...
Patent number
8,218,130
Issue date
Jul 10, 2012
ASML Netherlands B.V.
Marinus Johannes Maria Van Dam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method for its use
Patent number
7,148,954
Issue date
Dec 12, 2006
ASML Netherlands B.V.
Marinus Johannes Maria Van Dam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF ADJUSTING...
Publication number
20120154777
Publication date
Jun 21, 2012
ASML NETHERLANDS B.V.
Gosse Charles De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GAS MANIFOLD, MODULE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APP...
Publication number
20120092631
Publication date
Apr 19, 2012
ASML NETHERLANDS B.V.
Frank Johannes Jacobus VAN BOXTEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method and lithographic apparatus,and computer...
Publication number
20090122290
Publication date
May 14, 2009
ASML NETHERLANDS B.V.
Marinus Johannes Maria Van Dam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20040263816
Publication date
Dec 30, 2004
ASML NETHERLANDS B.V.
Marinus Johannes Maria Van Dam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY