Marinus Maria Johannes Van De Wal

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Oirschot, NL

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Patents Grantslast 30 patents

Information Patent Grant
Control system, positioning system, lithographic apparatus, control...
- Patent number 10,095,123
- Issue date Oct 9, 2018
- ASML Netherlands B.V.
- Marinus Maria Johannes Van De Wal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, substrate support system, device manufactur...
- Patent number 9,715,182
- Issue date Jul 25, 2017
- ASML Netherlands B.V.
- Marinus Maria Johannes Van De Wal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system, lithographic apparatus and device manufacturing...
- Patent number 9,383,659
- Issue date Jul 5, 2016
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,141,004
- Issue date Sep 22, 2015
- ASML Netherlands B.V.
- Johannes Petrus Martinus Bernardus Vermeulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controller, lithographic apparatus, method of controlling the posit...
- Patent number 8,854,607
- Issue date Oct 7, 2014
- ASML Netherlands B.V.
- Ramidin Izair Kamidi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
A METHOD AND SYSTEM FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM
- Publication number 20240077380
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Marinus Maria Johannes VAN DE WAL
- G01 - MEASURING TESTING
Information Patent Application
CONTROL SYSTEM, POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS, CONTROL...
- Publication number 20170212431
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Marinus Maria Johannes VAN DE WAL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE SUPPORT SYSTEM, DEVICE MANUFACTUR...
- Publication number 20150316860
- Publication date Nov 5, 2015
- ASML NETHERLANDS B.V.
- Marinus Maria Johannes VAN DE WAL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20150168852
- Publication date Jun 18, 2015
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY