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Mario Hennig
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for producing a mask for the lithographic projection of a pa...
Patent number
7,644,389
Issue date
Jan 5, 2010
Qimonda AG
Mario Hennig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for reducing an overlay error and measurement mark for carry...
Patent number
7,425,396
Issue date
Sep 16, 2008
Infineon Technologies AG
Stefan Gruss
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Set of at least two masks for the projection of structure patterns
Patent number
7,393,613
Issue date
Jul 1, 2008
Infineon Technologies AG
Wolfgang Dettmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Set of masks including a first mask and a second trimming mask with...
Patent number
7,393,614
Issue date
Jul 1, 2008
Infineon Technologies AG
Roderick Köhle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for projecting a pattern into an image plane
Patent number
7,339,652
Issue date
Mar 4, 2008
Infineon Technologies AG
Molela Moukara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask with programmed defects and method for the fabrication thereof
Patent number
7,045,254
Issue date
May 16, 2006
Infineon Technologies AG
Wolfgang Dettmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photolithographic mask and methods for producing a structure and of...
Patent number
6,838,216
Issue date
Jan 4, 2005
Infineon Technologies AG
Uwe Griesinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method of Patterning a Substrate, Photosensitive Layer Stack and Sy...
Publication number
20090170024
Publication date
Jul 2, 2009
Mario Hennig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask Structure for Manufacturing an Integrated Circuit by Photolith...
Publication number
20080204686
Publication date
Aug 28, 2008
Wolfgang Henke
G02 - OPTICS
Information
Patent Application
Transistor arrangement, sense-amplifier arrangement and methods of...
Publication number
20080042171
Publication date
Feb 21, 2008
Sebastian Mosler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask arrangement, optical projection system and method for obtainin...
Publication number
20070287075
Publication date
Dec 13, 2007
Rainer Pforr
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PRODUCING A MASK FOR THE LITHOGRAPHIC PROJECTION OF A PA...
Publication number
20070196744
Publication date
Aug 23, 2007
Qimonda AG
Mario Hennig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and system for photolithography
Publication number
20070009816
Publication date
Jan 11, 2007
Rainer Pforr
G02 - OPTICS
Information
Patent Application
Apparatus for projecting a pattern into an image plane
Publication number
20060181691
Publication date
Aug 17, 2006
Molela Moukara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging system and method for producing semiconductor structures on...
Publication number
20060183258
Publication date
Aug 17, 2006
Mario Hennig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for producing semiconductor patterns on a wafer
Publication number
20060177773
Publication date
Aug 10, 2006
Mario Hennig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for transferring a layout of an integrated circuit level to...
Publication number
20050196689
Publication date
Sep 8, 2005
Christoph Nolscher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for reducing an overlay error and measurement mark for carry...
Publication number
20050069790
Publication date
Mar 31, 2005
Stefan Gruss
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Set of at least two masks for the projection of structure patterns...
Publication number
20040202943
Publication date
Oct 14, 2004
Wolfgang Dettmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Set of masks for the projection of structure patterns onto a semico...
Publication number
20040197677
Publication date
Oct 7, 2004
Roderick Kohle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photolithographic mask and methods for producing a structure and of...
Publication number
20040038135
Publication date
Feb 26, 2004
Uwe Griesinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask with programmed defects and method for the fabrication thereof
Publication number
20030134206
Publication date
Jul 17, 2003
Wolfgang Dettmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY