Mario Laengle

Person

Jena, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for reproducing a target wavefront of an imaging optical pro...
- Patent number 12,158,703
- Issue date Dec 3, 2024
- Carl Zeiss SMT GmbH
- Lukas Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for measuring masks for microlithography and autofocusing me...
- Patent number 11,647,288
- Issue date May 9, 2023
- Carl Zeiss SMT GmbH
- Mario Laengle
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 10,578,881
- Issue date Mar 3, 2020
- Carl Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 10,168,539
- Issue date Jan 1, 2019
- Carl Zeiss SMT GmbH
- Thomas Frank
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 9,904,060
- Issue date Feb 27, 2018
- Carl Zeiss AG
- Thomas Frank
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for establishing distortion properties of an optical system...
- Patent number 9,366,637
- Issue date Jun 14, 2016
- Carl Zeiss SMS GmbH
- Mario Laengle
- G01 - MEASURING TESTING
Information Patent Grant
Mask inspection microscope with variable illumination setting
- Patent number 8,970,951
- Issue date Mar 3, 2015
- Carl Zeiss SMS GmbH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Grant
Method for determining the position of a structure within an image...
- Patent number 8,717,581
- Issue date May 6, 2014
- Carl Zeiss SMS GmbH
- Mario Laengle
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MIC...
- Publication number 20240393269
- Publication date Nov 28, 2024
- Carl Zeiss SMT GMBH
- Jens Oster
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR REPRODUCING A TARGET WAVEFRONT OF AN IMAGING OPTICAL PRO...
- Publication number 20230130187
- Publication date Apr 27, 2023
- Carl Zeiss SMT GMBH
- Lukas Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING AN IMAGE OF A MICROLITHOGRAPHIC...
- Publication number 20220383485
- Publication date Dec 1, 2022
- Carl Zeiss SMT GMBH
- Mario Laengle
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING A REGISTRATION ERROR
- Publication number 20220365449
- Publication date Nov 17, 2022
- Carl Zeiss SMT GMBH
- Mario Laengle
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE FOR MEASURING MASKS FOR MICROLITHOGRAPHY AND AUTOFOCUSING ME...
- Publication number 20200412939
- Publication date Dec 31, 2020
- Carl Zeiss SMT GMBH
- Mario Laengle
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20190121145
- Publication date Apr 25, 2019
- Carl-Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20180173001
- Publication date Jun 21, 2018
- Carl-Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20150001408
- Publication date Jan 1, 2015
- Carl-Zeiss AG
- Thomas Frank
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ESTABLISHING DISTORTION PROPERTIES OF AN OPTICAL SYSTEM...
- Publication number 20140369592
- Publication date Dec 18, 2014
- Mario Laengle
- G01 - MEASURING TESTING
Information Patent Application
MASK INSPECTION MICROSCOPE WITH VARIABLE ILLUMINATION SETTING
- Publication number 20120162755
- Publication date Jun 28, 2012
- CARL ZEISS SMS GMBH
- Ulrich Stroessner
- G02 - OPTICS
Information Patent Application
Method for Determining the Position of a Structure Within an Image...
- Publication number 20120081712
- Publication date Apr 5, 2012
- Carl Zeiss SMS GmbH
- Mario Laengle
- G06 - COMPUTING CALCULATING COUNTING

Mario Laengle

Person

Patents Grantslast 30 patents

Method for reproducing a target wavefront of an imaging optical pro...

Device for measuring masks for microlithography and autofocusing me...

Illumination optical unit for a metrology system and metrology syst...

Illumination optical unit for a metrology system and metrology syst...

Illumination optical unit for a metrology system and metrology syst...

Method for establishing distortion properties of an optical system...

Mask inspection microscope with variable illumination setting

Method for determining the position of a structure within an image...

Patents Applicationslast 30 patents

METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MIC...

METHOD FOR REPRODUCING A TARGET WAVEFRONT OF AN IMAGING OPTICAL PRO...

METHOD AND APPARATUS FOR ANALYZING AN IMAGE OF A MICROLITHOGRAPHIC...

METHOD FOR DETERMINING A REGISTRATION ERROR

DEVICE FOR MEASURING MASKS FOR MICROLITHOGRAPHY AND AUTOFOCUSING ME...

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

METHOD FOR ESTABLISHING DISTORTION PROPERTIES OF AN OPTICAL SYSTEM...

MASK INSPECTION MICROSCOPE WITH VARIABLE ILLUMINATION SETTING

Method for Determining the Position of a Structure Within an Image...