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Oberkochen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam system
Patent number
11,562,881
Issue date
Jan 24, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system
Patent number
11,164,715
Issue date
Nov 2, 2021
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system
Patent number
10,811,215
Issue date
Oct 20, 2020
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle multi-beam inspection system and method of operati...
Patent number
9,263,233
Issue date
Feb 16, 2016
Carl Zeiss Microscopy GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Charged Particle Beam System
Publication number
20220108864
Publication date
Apr 7, 2022
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM SYSTEM
Publication number
20200411274
Publication date
Dec 31, 2020
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM SYSTEM
Publication number
20190355545
Publication date
Nov 21, 2019
CARL ZEISS MICROSCOPY GMBH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE MULTI-BEAM INSPECTION SYSTEM AND METHOD OF OPERATI...
Publication number
20150090879
Publication date
Apr 2, 2015
CARL ZEISS MICROSCOPY GMBH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS