Mario Schiffler

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Oepfershausen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Mask blank for use in EUV lithography and method for its production
- Patent number 7,517,617
- Issue date Apr 14, 2009
- Schott AG
- Lutz Aschke
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for removing an edge region of a layer applied...
- Publication number 20050020087
- Publication date Jan 27, 2005
- Hermann Wagner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Mask blank for use in EUV lithography and method for its production
- Publication number 20040234870
- Publication date Nov 25, 2004
- Lutz Aschke
- B82 - NANO-TECHNOLOGY
Information Patent Application
Photo mask blank, photo mask, method and apparatus for manufacturin...
- Publication number 20040231971
- Publication date Nov 25, 2004
- Hans Becker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Photo mask blank, photo mask, method and apparatus for manufacturin...
- Publication number 20040159538
- Publication date Aug 19, 2004
- Hans Becker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...