Mariusch Gregor

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for pulse width modulated dose control
- Patent number 12,215,421
- Issue date Feb 4, 2025
- Lam Research Corporation
- Mariusch Gregor
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Turbomolecular pump and cathode assembly for etching reactor
- Patent number 12,106,946
- Issue date Oct 1, 2024
- Lam Research Corporation
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for pulse width modulated dose control
- Patent number 11,834,736
- Issue date Dec 5, 2023
- Lam Research Corporation
- Mariusch Gregor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for pulse width modulated dose control
- Patent number 11,542,598
- Issue date Jan 3, 2023
- Lam Research Corporation
- Mariusch Gregor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Active showerhead
- Patent number 10,804,079
- Issue date Oct 13, 2020
- Lam Research Corporation
- Mariusch Gregor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pump power consumption enhancement
- Patent number 10,428,807
- Issue date Oct 1, 2019
- Applied Materials, Inc.
- Mariusch Gregor
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Active showerhead
- Patent number 10,403,476
- Issue date Sep 3, 2019
- Lam Research Corporation
- Mariusch Gregor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for monitoring a flow controller coupled to a process chamber
- Patent number 10,222,810
- Issue date Mar 5, 2019
- Applied Materials, Inc.
- Balarabe N. Mohammed
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and system for controlling a flow ratio controller using fee...
- Patent number 10,114,389
- Issue date Oct 30, 2018
- Applied Materials, Inc.
- Mariusch Gregor
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for controlling a flow ratio controller using fee...
- Patent number 10,108,205
- Issue date Oct 23, 2018
- Applied Materials, Inc.
- Mariusch Gregor
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for monitoring a flow controller coupled to a process chamber
- Patent number 9,772,629
- Issue date Sep 26, 2017
- Applied Materials, Inc.
- Balarabe N. Mohammed
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for in-situ calibration of a flow controller
- Patent number 9,644,796
- Issue date May 9, 2017
- Applied Materials, Inc.
- Balarabe N. Mohammed
- G05 - CONTROLLING REGULATING
Information Patent Grant
Compact device for enhancing the mixing of gaseous species
- Patent number 9,327,252
- Issue date May 3, 2016
- Applied Materials, Inc.
- John W. Lane
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
N-channel flow ratio controller calibration
- Patent number 9,200,754
- Issue date Dec 1, 2015
- Applied Materials, Inc.
- Mariusch Gregor
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Methods and apparatus for enhanced gas flow rate control
- Patent number 9,004,107
- Issue date Apr 14, 2015
- Applied Materials, Inc.
- Mariusch Gregor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing substrates using model-based c...
- Patent number 8,880,210
- Issue date Nov 4, 2014
- Applied Materials, Inc.
- Keith Brian Porthouse
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and apparatus for calibrating flow controllers in substrate...
- Patent number 8,707,754
- Issue date Apr 29, 2014
- Applied Materials, Inc.
- James P. Cruse
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
N-channel flow ratio controller calibration
- Patent number 8,397,739
- Issue date Mar 19, 2013
- Applied Materials, Inc.
- Mariusch Gregor
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Real time lead-line characterization for MFC flow verification
- Patent number 8,205,629
- Issue date Jun 26, 2012
- Applied Materials, Inc.
- Mariusch Gregor
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for dampening pressure fluctuations in a fluid...
- Patent number 8,015,989
- Issue date Sep 13, 2011
- Applied Materials, Inc.
- John William Lane
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Electromagnetically levitated substrate support
- Patent number 6,800,833
- Issue date Oct 5, 2004
- Mariusch Gregor
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR
- Publication number 20240355596
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL
- Publication number 20240093365
- Publication date Mar 21, 2024
- LAM RESEARCH CORPORATION
- Mariusch GREGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL
- Publication number 20230160065
- Publication date May 25, 2023
- LAM RESEARCH CORPORATION
- Mariusch GREGOR
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
NON-ELASTOMERIC, NON-POLYMERIC, NON-METALLIC MEMBRANE VALVES FOR SE...
- Publication number 20220252183
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Mariusch Gregor
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR
- Publication number 20220186734
- Publication date Jun 16, 2022
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY, CONTROLLED INTEGRATED CIRCUITS FACTORY
- Publication number 20220171370
- Publication date Jun 2, 2022
- LAM RESEARCH CORPORATION
- Thorsten LILL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL
- Publication number 20200270748
- Publication date Aug 27, 2020
- LAM RESEARCH CORPORATION
- Mariusch GREGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVE SHOWERHEAD
- Publication number 20190371573
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Mariusch Gregor
- G01 - MEASURING TESTING
Information Patent Application
ACTIVE SHOWERHEAD
- Publication number 20180130640
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Mariusch Gregor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR MONITORING A FLOW CONTROLLER COUPLED TO A PROCESS CHAMBER
- Publication number 20180024573
- Publication date Jan 25, 2018
- BALARABE N. MOHAMMED
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR CONTROLLING A FLOW RATIO CONTROLLER USING FEE...
- Publication number 20150005956
- Publication date Jan 1, 2015
- Applied Materials, Inc.
- Mariusch Gregor
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM FOR CONTROLLING A FLOW RATIO CONTROLLER USING FEE...
- Publication number 20150005955
- Publication date Jan 1, 2015
- Applied Materials, Inc.
- Mariusch Gregor
- G05 - CONTROLLING REGULATING
Information Patent Application
COMPACT DEVICE FOR ENHANCING THE MIXING OF GASEOUS SPECIES
- Publication number 20140269156
- Publication date Sep 18, 2014
- JOHN W. LANE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Methods and Apparatus for Enhanced Gas Flow Rate Control
- Publication number 20140053912
- Publication date Feb 27, 2014
- Applied Materials, Inc.
- Mariusch Gregor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
N-CHANNEL FLOW RATIO CONTROLLER CALIBRATION
- Publication number 20130233401
- Publication date Sep 12, 2013
- Mariusch GREGOR
- G01 - MEASURING TESTING
Information Patent Application
PUMP POWER CONSUMPTION ENHANCEMENT
- Publication number 20130156610
- Publication date Jun 20, 2013
- Applied Materials, Inc.
- MARIUSCH GREGOR
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
METHODS FOR MONITORING A FLOW CONTROLLER COUPLED TO A PROCESS CHAMBER
- Publication number 20130092243
- Publication date Apr 18, 2013
- Applied Materials, Inc.
- BALARABE N. MOHAMMED
- G01 - MEASURING TESTING
Information Patent Application
METHODS FOR IN-SITU CALIBRATION OF A FLOW CONTROLLER
- Publication number 20130081702
- Publication date Apr 4, 2013
- Applied Materials, Inc.
- BALARABE N. MOHAMMED
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING MODEL-BASED C...
- Publication number 20130018500
- Publication date Jan 17, 2013
- Applied Materials, Inc.
- KEITH BRIAN PORTHOUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE...
- Publication number 20110265549
- Publication date Nov 3, 2011
- Applied Materials, Inc.
- JAMES P. CRUSE
- G01 - MEASURING TESTING
Information Patent Application
N-CHANNEL FLOW RATIO CONTROLLER CALIBRATION
- Publication number 20110178628
- Publication date Jul 21, 2011
- Applied Materials, Inc.
- Mariusch Gregor
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
METHOD AND APPARATUS FOR DAMPENING PRESSURE FLUCTUATIONS IN A FLUID...
- Publication number 20090301567
- Publication date Dec 10, 2009
- John William Lane
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
REAL TIME LEAD-LINE CHARACTERIZATION FOR MFC FLOW VERIFICATION
- Publication number 20090266139
- Publication date Oct 29, 2009
- Applied Materials, Inc.
- Mariusch Gregor
- G01 - MEASURING TESTING
Information Patent Application
Electromagnetically levitated substrate support
- Publication number 20030183611
- Publication date Oct 2, 2003
- APPLIED MATERIALS, INC.
- Mariusch Gregor
- C30 - CRYSTAL GROWTH

Mariusch Gregor

Person

Patents Grantslast 30 patents

Systems and methods for pulse width modulated dose control

Turbomolecular pump and cathode assembly for etching reactor

Systems and methods for pulse width modulated dose control

Systems and methods for pulse width modulated dose control

Active showerhead

Pump power consumption enhancement

Active showerhead

Methods for monitoring a flow controller coupled to a process chamber

Method and system for controlling a flow ratio controller using fee...

Method and system for controlling a flow ratio controller using fee...

Methods for monitoring a flow controller coupled to a process chamber

Methods for in-situ calibration of a flow controller

Compact device for enhancing the mixing of gaseous species

N-channel flow ratio controller calibration

Methods and apparatus for enhanced gas flow rate control

Methods and apparatus for processing substrates using model-based c...

Methods and apparatus for calibrating flow controllers in substrate...

N-channel flow ratio controller calibration

Real time lead-line characterization for MFC flow verification

Method and apparatus for dampening pressure fluctuations in a fluid...

Electromagnetically levitated substrate support

Patents Applicationslast 30 patents

TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR

SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL

SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL

NON-ELASTOMERIC, NON-POLYMERIC, NON-METALLIC MEMBRANE VALVES FOR SE...

TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR

HIGH DENSITY, CONTROLLED INTEGRATED CIRCUITS FACTORY

SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL

ACTIVE SHOWERHEAD

ACTIVE SHOWERHEAD

METHODS FOR MONITORING A FLOW CONTROLLER COUPLED TO A PROCESS CHAMBER

METHOD AND SYSTEM FOR CONTROLLING A FLOW RATIO CONTROLLER USING FEE...

METHOD AND SYSTEM FOR CONTROLLING A FLOW RATIO CONTROLLER USING FEE...

COMPACT DEVICE FOR ENHANCING THE MIXING OF GASEOUS SPECIES

Methods and Apparatus for Enhanced Gas Flow Rate Control

N-CHANNEL FLOW RATIO CONTROLLER CALIBRATION

PUMP POWER CONSUMPTION ENHANCEMENT

METHODS FOR MONITORING A FLOW CONTROLLER COUPLED TO A PROCESS CHAMBER

METHODS FOR IN-SITU CALIBRATION OF A FLOW CONTROLLER

METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING MODEL-BASED C...

METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE...

N-CHANNEL FLOW RATIO CONTROLLER CALIBRATION

METHOD AND APPARATUS FOR DAMPENING PRESSURE FLUCTUATIONS IN A FLUID...

REAL TIME LEAD-LINE CHARACTERIZATION FOR MFC FLOW VERIFICATION

Electromagnetically levitated substrate support