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Mariya Vyacheslavivna MEDVEDYEVA
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method of determining information about a patterning process, metho...
Patent number
11,531,274
Issue date
Dec 20, 2022
ASML Netherlands B.V.
Mariya Vyacheslavivna Medvedyeva
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining a value of a parameter of interest of a targe...
Patent number
10,585,048
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Samee Ur Rehman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of optimizing a metrology process
Patent number
10,585,354
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Anagnostis Tsiatmas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining an optimal focus height for a metrology appar...
Patent number
10,571,363
Issue date
Feb 25, 2020
ASML Netherlands B.V.
Mariya Vyacheslavivna Medvedyeva
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beat patterns for alignment on small metrology targets
Patent number
10,488,768
Issue date
Nov 26, 2019
ASML Netherlands B.V.
Bastiaan Onne Fagginger Auer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHO...
Publication number
20210191280
Publication date
Jun 24, 2021
ASML NETHERLANDS B.V.
Mariya Vyacheslavivna Medvedyeva
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A TARGE...
Publication number
20190323972
Publication date
Oct 24, 2019
ASML NETHERLANDS B.V.
Samee Ur REHMAN
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF DETERMINING AN OPTIMAL FOCUS HEIGHT FOR A METROLOGY APPAR...
Publication number
20190242782
Publication date
Aug 8, 2019
ASML NETHERLANDS B.V.
Mariya Vyacheslavivna MEDVEDYEVA
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF OPTIMIZING A METROLOGY PROCESS
Publication number
20190243253
Publication date
Aug 8, 2019
ASML NETHERLANDS B.V.
Anagnostis TSIATMAS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PROCESSING DATA, METHOD OF OBTAINING CALIBRATION DATA
Publication number
20190204180
Publication date
Jul 4, 2019
ASML NETHERLANDS B.V.
Mariya Vyacheslavivna MEDVEDYEVA
G01 - MEASURING TESTING
Information
Patent Application
BEAT PATTERNS FOR ALIGNMENT ON SMALL METROLOGY TARGETS
Publication number
20190072860
Publication date
Mar 7, 2019
ASML NETHERLANDS B.V.
Bastiaan Onne FAGGINGER AUER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY