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Mark A. Burgholzer
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Amboy, WA, US
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last 30 patents
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Patent Grant
Selective etching processes of silicon nitride and indium oxide thi...
Patent number
7,338,907
Issue date
Mar 4, 2008
Sharp Laboratories of America, Inc.
Tingkai Li
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Selective etching processes of silicon nitride and indium oxide thi...
Publication number
20060073706
Publication date
Apr 6, 2006
Sharp Laboratories of America, Inc.
Tingkai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for low temperature oxidation of silicon
Publication number
20030224619
Publication date
Dec 4, 2003
Yoshi Ono
C30 - CRYSTAL GROWTH