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Mark A. Hueschen
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Palo Alto, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Systems and methods of monitoring thin film deposition
Patent number
6,668,618
Issue date
Dec 30, 2003
Agilent Technologies, Inc.
John D. Larson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods of monitoring thin film deposition
Patent number
6,651,488
Issue date
Nov 25, 2003
Agilent Technologies, Inc.
John D. Larson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Systems and methods of monitoring thin film deposition
Publication number
20030041654
Publication date
Mar 6, 2003
John D. Larson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Systems and methods of monitoring thin film deposition
Publication number
20020152803
Publication date
Oct 24, 2002
John D. Larson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...