Mark A. Neil

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multilayer film metrology using an effective media approximation
- Patent number 10,429,296
- Issue date Oct 1, 2019
- KLA-Tencor Corporation
- Mark A. Neil
- G02 - OPTICS
Information Patent Grant
Variable resolution spectrometer
- Patent number 10,386,233
- Issue date Aug 20, 2019
- KLA-Tencor Corporation
- Mark Allen Neil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spectroscopy with tailored spectral sampling
- Patent number 10,151,631
- Issue date Dec 11, 2018
- KLA-Tencor Corporation
- Mark A. Neil
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of overlay and edge placement errors with an electron b...
- Patent number 10,141,156
- Issue date Nov 27, 2018
- KLA-Tencor Corporation
- Mark Allen Neil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auger elemental identification algorithm
- Patent number 8,658,973
- Issue date Feb 25, 2014
- KLA-Tencor Corporation
- Mark Neil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Region-of-interest based electron beam metrology
- Patent number 7,241,991
- Issue date Jul 10, 2007
- KLA-Tencor Technologies Corporation
- Keith Standiford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated focusing of electron image
- Patent number 7,041,976
- Issue date May 9, 2006
- KLA-Tencor Technologies Corporation
- Mark A. Neil
- G01 - MEASURING TESTING
Information Patent Grant
Methods of stabilizing measurement of ArF resist in CD-SEM
- Patent number 7,015,468
- Issue date Mar 21, 2006
- KLA-Tencor Technologies Corporation
- Amir Azordegan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods And Systems For Systematic Error Compensation Across A Flee...
- Publication number 20240053280
- Publication date Feb 15, 2024
- KLA Corporation
- Ming Di
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE RESOLUTION SPECTROMETER
- Publication number 20190212255
- Publication date Jul 11, 2019
- KLA-Tencor Corporation
- Mark Allen Neil
- G01 - MEASURING TESTING
Information Patent Application
Multilayer Film Metrology Using An Effective Media Approximation
- Publication number 20190033211
- Publication date Jan 31, 2019
- KLA-Tencor Corporation
- Mark A. Neil
- G02 - OPTICS
Information Patent Application
Spectroscopy with Tailored Spectral Sampling
- Publication number 20180094978
- Publication date Apr 5, 2018
- KLA-Tencor Corporation
- Mark A. Neil
- G01 - MEASURING TESTING
Information Patent Application
Measurement of Overlay and Edge Placement Errors With an Electron B...
- Publication number 20180090296
- Publication date Mar 29, 2018
- KLA-Tencor Corporation
- Mark Allen Neil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR REAL-TIME THREE-DIMENSIONAL SEM IMAGING A...
- Publication number 20120223227
- Publication date Sep 6, 2012
- Chien-Huei CHEN
- G01 - MEASURING TESTING

Mark A. Neil

Person

Patents Grantslast 30 patents

Multilayer film metrology using an effective media approximation

Variable resolution spectrometer

Spectroscopy with tailored spectral sampling

Measurement of overlay and edge placement errors with an electron b...

Auger elemental identification algorithm

Region-of-interest based electron beam metrology

Automated focusing of electron image

Methods of stabilizing measurement of ArF resist in CD-SEM

Patents Applicationslast 30 patents

Methods And Systems For Systematic Error Compensation Across A Flee...

VARIABLE RESOLUTION SPECTROMETER

Multilayer Film Metrology Using An Effective Media Approximation

Spectroscopy with Tailored Spectral Sampling

Measurement of Overlay and Edge Placement Errors With an Electron B...

APPARATUS AND METHODS FOR REAL-TIME THREE-DIMENSIONAL SEM IMAGING A...