Mark A. Perrin

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electromagnet array in a sputter reactor
- Patent number 8,871,064
- Issue date Oct 28, 2014
- Applied Materials, Inc.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step process for forming a metal barrier in a sputter reactor
- Patent number 7,686,926
- Issue date Mar 30, 2010
- Applied Materials, Inc.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable quadruple electromagnet array in plasma processing
- Patent number 7,527,713
- Issue date May 5, 2009
- Applied Materials, Inc.
- Tza-Jing Gung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable field magnet apparatus
- Patent number 6,864,773
- Issue date Mar 8, 2005
- Applied Materials, Inc.
- Mark A. Perrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active magnetic shielding
- Patent number 6,846,396
- Issue date Jan 25, 2005
- Applied Materials, Inc.
- Mark A. Perrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inverted magnetron
- Patent number 6,761,804
- Issue date Jul 13, 2004
- Applied Materials, Inc.
- Mark A. Perrin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Electromagnet array in a sputter reactor
- Publication number 20100155223
- Publication date Jun 24, 2010
- Applied Materials, Inc.
- Tza-Jing GUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Variable quadruple electromagnet array in plasma processing
- Publication number 20050263389
- Publication date Dec 1, 2005
- Tza-Jing Gung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-step process for forming a metal barrier in a sputter reactor
- Publication number 20050263390
- Publication date Dec 1, 2005
- APPLIED MATERIALS, INC.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oblique ion milling of via metallization
- Publication number 20040222082
- Publication date Nov 11, 2004
- APPLIED MATERIALS, INC.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Variable field magnet apparatus
- Publication number 20040196127
- Publication date Oct 7, 2004
- APPLIED MATERIALS, INC.
- Mark A. Perrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Active magnetic shielding
- Publication number 20040026233
- Publication date Feb 12, 2004
- APPLIED MATERIALS, INC.
- Mark A. Perrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma reactor with plural independently driven concentric coaxial...
- Publication number 20030178143
- Publication date Sep 25, 2003
- APPLIED MATERIALS, INC.
- Mark Perrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inverted magnetron
- Publication number 20030150721
- Publication date Aug 14, 2003
- APPLIED MATERIALS, INC.
- Mark A. Perrin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mark A. Perrin

Person

Patents Grantslast 30 patents

Electromagnet array in a sputter reactor

Multi-step process for forming a metal barrier in a sputter reactor

Variable quadruple electromagnet array in plasma processing

Variable field magnet apparatus

Active magnetic shielding

Inverted magnetron

Patents Applicationslast 30 patents

Electromagnet array in a sputter reactor

Variable quadruple electromagnet array in plasma processing

Multi-step process for forming a metal barrier in a sputter reactor

Oblique ion milling of via metallization

Variable field magnet apparatus

Active magnetic shielding

Plasma reactor with plural independently driven concentric coaxial...

Inverted magnetron