Mark Allen Kennard

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Pleasanton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
High temperature electrostatic chuck
- Patent number 6,669,783
- Issue date Dec 30, 2003
- Lam Research Corporation
- Greg Sexton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature electrostatic chuck
- Patent number 6,567,258
- Issue date May 20, 2003
- Lam Research Corporation
- Greg Sexton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature electrostatic chuck
- Patent number 6,377,437
- Issue date Apr 23, 2002
- Lam Research Corporation
- Greg Sexton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for forming trenches in a silicon layer of a substrate i...
- Patent number 5,935,874
- Issue date Aug 10, 1999
- Lam Research Corporation
- Mark A. Kennard
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
High temperature electrostatic chuck
- Publication number 20030003749
- Publication date Jan 2, 2003
- Greg Sexton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High temperature electrostatic chuck
- Publication number 20020075625
- Publication date Jun 20, 2002
- Greg Sexton
- H01 - BASIC ELECTRIC ELEMENTS