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Mark Borowicz
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San Jose, CA, US
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last 30 patents
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Patent Grant
Methods and systems for measuring a characteristic of a substrate o...
Patent number
8,765,496
Issue date
Jul 1, 2014
KLA-Tencor Technologies Corp.
Mehran Nasser-Ghodsi
G01 - MEASURING TESTING
Information
Patent Grant
Charge-control method and apparatus for electron beam imaging
Patent number
7,488,938
Issue date
Feb 10, 2009
KLA-Tencor Technologies Corporation
Alexander Jozef Gubbens
G01 - MEASURING TESTING
Information
Patent Grant
Methods and systems for measuring a characteristic of a substrate o...
Patent number
7,365,321
Issue date
Apr 29, 2008
KLA-Tencor Technologies Corp.
Mehran Nasser-Ghodsi
G01 - MEASURING TESTING
Information
Patent Grant
Systems configured to reduce distortion of a resist during a metrol...
Patent number
7,304,302
Issue date
Dec 4, 2007
KLA-Tencor Technologies Corp.
Peter Nunan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Methods and Systems for Measuring a Characteristic of a Substrate o...
Publication number
20140291516
Publication date
Oct 2, 2014
Mehran Nasser-Ghodsi
G01 - MEASURING TESTING
Information
Patent Application
METHODS AND SYSTEMS FOR MEASURING A CHARACTERISTIC OF A SUBSTRATE O...
Publication number
20080264905
Publication date
Oct 30, 2008
Mehran Nasser-Ghodsi
G01 - MEASURING TESTING
Information
Patent Application
Methods and systems for measuring a characteristic of a substrate o...
Publication number
20050221229
Publication date
Oct 6, 2005
Mehran Nasser-Ghodsi
G01 - MEASURING TESTING