Mark C. Phillips

Person

  • Portland, OR, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Fill pattern to enhance ebeam process margin

    • Patent number 11,581,162
    • Issue date Feb 14, 2023
    • Intel Corporation
    • Shakul Tandon
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Fill pattern to enhance e-beam process margin

    • Patent number 11,107,658
    • Issue date Aug 31, 2021
    • Intel Corporation
    • Shakul Tandon
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ebeam universal cutter

    • Patent number 10,578,970
    • Issue date Mar 3, 2020
    • Intel Corporation
    • Yan A. Borodovsky
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Aperture size modulation to enhance ebeam patterning resolution

    • Patent number 10,395,883
    • Issue date Aug 27, 2019
    • Intel Corporation
    • Shakul Tandon
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ebeam staggered beam aperture array

    • Patent number 10,386,722
    • Issue date Aug 20, 2019
    • Intel Corporation
    • Yan A. Borodovsky
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Ebeam align on the fly

    • Patent number 10,290,528
    • Issue date May 14, 2019
    • Intel Corporation
    • Yan A. Borodovsky
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Ebeam universal cutter

    • Patent number 10,216,087
    • Issue date Feb 26, 2019
    • Intel Corporation
    • Yan A. Borodovsky
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Ebeam three beam aperture array

    • Patent number 10,067,416
    • Issue date Sep 4, 2018
    • Intel Corporation
    • Yan A. Borodovsky
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Unidirectional metal on layer with ebeam

    • Patent number 10,014,256
    • Issue date Jul 3, 2018
    • Intel Corporation
    • Donald W. Nelson
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ebeam non-universal cutter

    • Patent number 9,952,511
    • Issue date Apr 24, 2018
    • Intel Corporation
    • Yan A. Borodovsky
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Ebeam three beam aperture array

    • Patent number 9,897,908
    • Issue date Feb 20, 2018
    • Intel Corporation
    • Yan A. Borodovsky
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pixelated modulation of illumination pupil image

    • Patent number 7,737,420
    • Issue date Jun 15, 2010
    • Intel Corporation
    • Kevin Huggins
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents