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Mark Constant Johannes BAGGEN
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Eindhoven, NL
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last 30 patents
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Patent Grant
Position control system, a lithographic apparatus and a method for...
Patent number
8,279,401
Issue date
Oct 2, 2012
ASML Netherlands B.V.
Michael Johannes Vervoordeldonk
G05 - CONTROLLING REGULATING
Information
Patent Grant
Stage system and lithographic apparatus comprising such stage system
Patent number
8,279,407
Issue date
Oct 2, 2012
ASML Netherlands B.V.
Ramidin Izair Kamidi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,014,881
Issue date
Sep 6, 2011
ASML Netherlands B.V.
Mark Constant Johannes Baggen
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND STAGE SYSTEM
Publication number
20120242271
Publication date
Sep 27, 2012
ASML NETHERLANDS B.V.
Jan-Gerard Cornelis VAN DER TOORN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Stage System and Lithographic Apparatus Comprising Such Stage System
Publication number
20090279067
Publication date
Nov 12, 2009
ASML NETHERLANDS B.V.
Ramidin Izair KAMIDI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITION CONTROL SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD FOR...
Publication number
20090268185
Publication date
Oct 29, 2009
ASML NETHERLANDS B.V.
Michael Johannes VERVOORDELDONK
G05 - CONTROLLING REGULATING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080200998
Publication date
Aug 21, 2008
ASML NETHERLANDS B.V.
Mark Constant Johannes Baggen
G05 - CONTROLLING REGULATING