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Mark Donahue
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Malden, MA, US
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last 30 patents
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Patent Grant
Methods and apparatus for ion beam angle measurement in two dimensions
Patent number
7,394,073
Issue date
Jul 1, 2008
Varian Semiconductor Equipment Associates, Inc.
James J. Cummings
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Methods & apparatus for ion beam angle measurement in two dimensions
Publication number
20060289798
Publication date
Dec 28, 2006
Varian Semiconductor Equipment Associates, Inc.
James J. Cummings
G01 - MEASURING TESTING