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Mark E. Emerson
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Newberg, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Distance measurement between gas distribution device and substrate...
Patent number
12,050,112
Issue date
Jul 30, 2024
Lam Research Corporation
Mark E. Emerson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Distance measurement between gas distribution device and substrate...
Patent number
11,408,734
Issue date
Aug 9, 2022
Lam Research Corporation
Mark E. Emerson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for measuring condition of electroplating cell components...
Patent number
10,989,747
Issue date
Apr 27, 2021
Lam Research Corporation
Mark E. Emerson
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Apparatus for measuring condition of electroplating cell components...
Patent number
10,436,829
Issue date
Oct 8, 2019
Lam Research Corporation
Mark E. Emerson
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Patents Applications
last 30 patents
Information
Patent Application
DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE...
Publication number
20220364858
Publication date
Nov 17, 2022
LAM RESEARCH CORPORATION
Mark E. EMERSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE...
Publication number
20200217657
Publication date
Jul 9, 2020
LAM RESEARCH CORPORATION
Mark E. EMERSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for Measuring Condition of Electroplating Cell Components...
Publication number
20200011914
Publication date
Jan 9, 2020
LAM RESEARCH CORPORATION
Mark E. Emerson
G01 - MEASURING TESTING
Information
Patent Application
Apparatus for Measuring Condition of Electroplating Cell Components...
Publication number
20170307554
Publication date
Oct 26, 2017
LAM RESEARCH CORPORATION
Mark E. Emerson
G01 - MEASURING TESTING