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Polishing layer analyzer and method
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Patent number 10,272,541
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Issue date Apr 30, 2019
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Rohm and Haas Electronic Matericals CMP Holdings, Inc.
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Scott Chang
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B24 - GRINDING POLISHING
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Hollow polymeric-silicate composite
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Patent number 8,357,446
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Issue date Jan 22, 2013
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Andrew R. Wank
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B24 - GRINDING POLISHING
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Silicate composite polishing pad
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Patent number 8,257,152
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Issue date Sep 4, 2012
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Andrew R. Wank
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B24 - GRINDING POLISHING
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