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Mark E. Lagus
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Stanfordville, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Monitoring a process sector in a production facility
Patent number
8,340,800
Issue date
Dec 25, 2012
International Business Machines Corporation
William Cote
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for fabricating a scanning probe microscope probe
Patent number
6,656,369
Issue date
Dec 2, 2003
International Business Machines Corporation
Mahadevaiyer Krishnan
G01 - MEASURING TESTING
Information
Patent Grant
Etching parameter control system process
Patent number
6,004,706
Issue date
Dec 21, 1999
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for critical dimension and tool resolution det...
Patent number
5,969,273
Issue date
Oct 19, 1999
International Business Machines Corporation
Charles N. Archie
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Focus or exposure dose parameter control system using tone reversin...
Patent number
5,965,309
Issue date
Oct 12, 1999
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MONITORING A PROCESS SECTOR IN A PRODUCTION FACILITY
Publication number
20100017010
Publication date
Jan 21, 2010
International Business Machines Corporation
William Cote
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for fabricating a scanning probe microscope probe
Publication number
20030132191
Publication date
Jul 17, 2003
International Business Machines Corporation
Mahadevaiyer Krishnan
G01 - MEASURING TESTING