Mark F. Buehler

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for defect reduction
- Patent number 6,918,819
- Issue date Jul 19, 2005
- Intel Corporation
- Mark F. Buehler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Abrasive with a modified surface and a method for making it
- Patent number 6,746,498
- Issue date Jun 8, 2004
- Intel Corporation
- Mark F. Buehler
- B24 - GRINDING POLISHING
Information Patent Grant
Method for post-CMP conversion of a hydrophobic surface of a low-k...
- Patent number 6,716,771
- Issue date Apr 6, 2004
- Intel Corporation
- Mark F. Buehler
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for defect reduction
- Patent number 6,592,433
- Issue date Jul 15, 2003
- Intel Corporation
- Mark F. Buehler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceria based slurry for chemical-mechanical polishing
- Patent number 6,358,853
- Issue date Mar 19, 2002
- Intel Corporation
- Kenneth C. Cadien
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
Clean chemistry composition, method of manufacturing same, and syst...
- Publication number 20080153731
- Publication date Jun 26, 2008
- Mark Buehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Novel chemical composition to reduce defects
- Publication number 20070228011
- Publication date Oct 4, 2007
- Mark F. Buehler
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Reducing aluminum dissolution in high pH solutions
- Publication number 20070152252
- Publication date Jul 5, 2007
- Mark F. Buehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Facilitating removal of sacrificial layers to form replacement meta...
- Publication number 20060046523
- Publication date Mar 2, 2006
- Jack Kavalieros
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Composition and a method for defect reduction
- Publication number 20050206005
- Publication date Sep 22, 2005
- Mark F. Buehler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Scrubbing brush with ligand attachments
- Publication number 20050092350
- Publication date May 5, 2005
- Mark Buehler
- B08 - CLEANING
Information Patent Application
ABRASIVE WITH A MODIFIED SURFACE AND A METHOD FOR MAKING IT
- Publication number 20040111976
- Publication date Jun 17, 2004
- Mark F. Buehler
- B24 - GRINDING POLISHING
Information Patent Application
Method for defect reduction
- Publication number 20030194949
- Publication date Oct 16, 2003
- Mark F. Buehler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for post-CMP conversion of a hydrophobic surface of a low-k...
- Publication number 20030190816
- Publication date Oct 9, 2003
- Mark F. Buehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION AND A METHOD FOR DEFECT REDUCTION
- Publication number 20030077981
- Publication date Apr 24, 2003
- Mark F. Buehler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ELECTROACTIVE FILM ON A SUBSTRATE AND METHOD OF MAKING
- Publication number 20020025449
- Publication date Feb 28, 2002
- JOHANES H. SUKAMTO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CERIA BASED SLURRY FOR CHEMICAL-MECHANICAL POLISHING
- Publication number 20020004317
- Publication date Jan 10, 2002
- KENNETH C. CADIEN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Mark F. Buehler

Person

Patents Grantslast 30 patents

Method for defect reduction

Abrasive with a modified surface and a method for making it

Method for post-CMP conversion of a hydrophobic surface of a low-k...

Method for defect reduction

Ceria based slurry for chemical-mechanical polishing

Patents Applicationslast 30 patents

Clean chemistry composition, method of manufacturing same, and syst...

Novel chemical composition to reduce defects

Reducing aluminum dissolution in high pH solutions

Facilitating removal of sacrificial layers to form replacement meta...

Composition and a method for defect reduction

Scrubbing brush with ligand attachments

ABRASIVE WITH A MODIFIED SURFACE AND A METHOD FOR MAKING IT

Method for defect reduction

Method for post-CMP conversion of a hydrophobic surface of a low-k...

COMPOSITION AND A METHOD FOR DEFECT REDUCTION

AN ELECTROACTIVE FILM ON A SUBSTRATE AND METHOD OF MAKING

CERIA BASED SLURRY FOR CHEMICAL-MECHANICAL POLISHING