Mark Henricus Wilhelmus VAN GERVEN

Follow

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatuses and methods for compensating for eigenmode...
- Patent number 9,329,502
- Issue date May 3, 2016
- ASML Holding N.V.
- Christopher Charles Ward
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Lithographic Apparatuses and Methods for Compensating For Eigenmode...
- Publication number 20130278915
- Publication date Oct 24, 2013
- ASML NETHERLANDS B.V.
- Christopher Charles WARD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY