Mark I. Wagner

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for preventing precipitation of etch byproducts during an e...
- Patent number 9,620,410
- Issue date Apr 11, 2017
- Lam Research Corporation
- Mark I. Wagner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for displacing fluids from substrates using s...
- Patent number 9,004,086
- Issue date Apr 14, 2015
- Lam Research Corporation
- Ronda K. Nixon
- B08 - CLEANING
Information Patent Grant
Method and system of drying a microelectronic topography
- Patent number 8,961,701
- Issue date Feb 24, 2015
- Lam Research Corporation
- Mark I. Wagner
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Composition and methods for forming metal films on semiconductor su...
- Patent number 8,623,764
- Issue date Jan 7, 2014
- Lam Research Corporation
- Mark Ian Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for forming and depositing metal films on...
- Patent number 8,617,301
- Issue date Dec 31, 2013
- Lam Research Corporation
- Mark Ian Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for preventing feature collapse during microele...
- Patent number 8,153,533
- Issue date Apr 10, 2012
- Lam Research
- James P. DeYoung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition and methods for forming metal films on semiconductor su...
- Patent number 7,786,011
- Issue date Aug 31, 2010
- Lam Research Corporation
- Mark Ian Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for image development of conventional chem...
- Patent number 7,648,818
- Issue date Jan 19, 2010
- MiCell Technologies, Inc.
- Mark Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of coating microelectronic substrates
- Patent number 7,592,035
- Issue date Sep 22, 2009
- MiCell Technologies, Inc.
- James P. DeYoung
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Compositions and methods for image development of conventional chem...
- Patent number 7,410,751
- Issue date Aug 12, 2008
- MiCell Technologies, Inc.
- James DeYoung
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Low pH development solutions for chemically amplified photoresists
- Patent number 7,329,483
- Issue date Feb 12, 2008
- MiCell Technologies, Inc.
- Mark Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Low pH development solutions for chemically amplified photoresists
- Patent number 7,235,347
- Issue date Jun 26, 2007
- MiCell Technologies, Inc.
- Mark Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of treating microelectronic substrates
- Patent number 7,141,496
- Issue date Nov 28, 2006
- MiCell Technologies, Inc.
- James P. DeYoung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of coating microelectronic substrates
- Patent number 6,989,172
- Issue date Jan 24, 2006
- MiCell Technologies, Inc.
- James P. DeYoung
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Compositions of transition metal species in dense phase carbon diox...
- Patent number 6,953,041
- Issue date Oct 11, 2005
- MiCell Technologies, Inc.
- James P. DeYoung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for transferring supercritical fluids in microelectronic an...
- Patent number 6,905,555
- Issue date Jun 14, 2005
- MiCell Technologies, Inc.
- James P. DeYoung
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods and compositions for etch cleaning microelectronic substrat...
- Patent number 6,669,785
- Issue date Dec 30, 2003
- MiCell Technologies, Inc.
- James P. DeYoung
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Semi-interpenetrating polymer network from epoxy monomer and olefin
- Patent number 6,355,735
- Issue date Mar 12, 2002
- 3M Innovative Properties Company
- Mark I. Wagner
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR DISPLACING FLUIDS FROM SUBSTRATES USING S...
- Publication number 20120111379
- Publication date May 10, 2012
- Ronda K. Nixon
- B08 - CLEANING
Information Patent Application
COMPOSITION AND METHODS FOR FORMING METAL FILMS ON SEMICONDUCTOR SU...
- Publication number 20100285664
- Publication date Nov 11, 2010
- LAM RESEARCH CORPORATION
- Mark Ian Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Preventing Precipitation of Etch Byproducts During an E...
- Publication number 20100184301
- Publication date Jul 22, 2010
- LAM RESEARCH
- Mark I. Wagner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF DRYING A MICROELECTRONIC TOPOGRAPHY
- Publication number 20100071726
- Publication date Mar 25, 2010
- LAM RESEARCH CORPORATION
- Mark I. Wagner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Preventing Feature Collapse During Microele...
- Publication number 20100072169
- Publication date Mar 25, 2010
- LAM RESEARCH
- James P. DeYoung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compositions and methods for forming and depositing metal films on...
- Publication number 20080213999
- Publication date Sep 4, 2008
- LAM RESEARCH CORPORATION
- Mark Ian Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Composition and methods for forming metal films on semiconductor su...
- Publication number 20080194103
- Publication date Aug 14, 2008
- LAM RESEARCH CORPORATION
- Mark Ian Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low pH Development Solutions for Chemically Amplified Photoresists
- Publication number 20070154848
- Publication date Jul 5, 2007
- Micell Technologies, Inc.
- Mark Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compositions and methods for image development of conventional chem...
- Publication number 20070003864
- Publication date Jan 4, 2007
- Mark Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compositions and methods for image development of conventional chem...
- Publication number 20060172144
- Publication date Aug 3, 2006
- James DeYoung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of coating microelectronic substrates
- Publication number 20060035014
- Publication date Feb 16, 2006
- James P. DeYoung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compositions and methods for image development of conventional chem...
- Publication number 20050227183
- Publication date Oct 13, 2005
- Mark Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of treating microelectronic substrates
- Publication number 20050161819
- Publication date Jul 28, 2005
- James P. DeYoung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating microelectronic substrates
- Publication number 20040146636
- Publication date Jul 29, 2004
- James P. DeYoung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compositions of transition metal species in dense phase carbon diox...
- Publication number 20040071873
- Publication date Apr 15, 2004
- James P. DeYoung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and compositions for etch cleaning microelectronic substrat...
- Publication number 20040045588
- Publication date Mar 11, 2004
- James P. DeYoung
- B08 - CLEANING
Information Patent Application
Methods for transferring supercritical fluids in microelectronic an...
- Publication number 20040020518
- Publication date Feb 5, 2004
- James P. DeYoung
- B08 - CLEANING
Information Patent Application
METHODS AND COMPOSITIONS FOR ETCH CLEANING MICROELECTRONIC SUBSTRAT...
- Publication number 20030216269
- Publication date Nov 20, 2003
- James P. DeYoung
- B08 - CLEANING

Mark I. Wagner

Person

Patents Grantslast 30 patents

Methods for preventing precipitation of etch byproducts during an e...

Methods and apparatus for displacing fluids from substrates using s...

Method and system of drying a microelectronic topography

Composition and methods for forming metal films on semiconductor su...

Compositions and methods for forming and depositing metal films on...

Methods and systems for preventing feature collapse during microele...

Composition and methods for forming metal films on semiconductor su...

Compositions and methods for image development of conventional chem...

Method of coating microelectronic substrates

Compositions and methods for image development of conventional chem...

Low pH development solutions for chemically amplified photoresists

Low pH development solutions for chemically amplified photoresists

Method of treating microelectronic substrates

Method of coating microelectronic substrates

Compositions of transition metal species in dense phase carbon diox...

Methods for transferring supercritical fluids in microelectronic an...

Methods and compositions for etch cleaning microelectronic substrat...

Semi-interpenetrating polymer network from epoxy monomer and olefin

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR DISPLACING FLUIDS FROM SUBSTRATES USING S...

COMPOSITION AND METHODS FOR FORMING METAL FILMS ON SEMICONDUCTOR SU...

Methods for Preventing Precipitation of Etch Byproducts During an E...

METHOD AND SYSTEM OF DRYING A MICROELECTRONIC TOPOGRAPHY

Methods and Systems for Preventing Feature Collapse During Microele...

Compositions and methods for forming and depositing metal films on...

Composition and methods for forming metal films on semiconductor su...

Low pH Development Solutions for Chemically Amplified Photoresists

Compositions and methods for image development of conventional chem...

Compositions and methods for image development of conventional chem...

Method of coating microelectronic substrates

Compositions and methods for image development of conventional chem...

Method of treating microelectronic substrates

Method of coating microelectronic substrates

Compositions of transition metal species in dense phase carbon diox...

Methods and compositions for etch cleaning microelectronic substrat...

Methods for transferring supercritical fluids in microelectronic an...

METHODS AND COMPOSITIONS FOR ETCH CLEANING MICROELECTRONIC SUBSTRAT...