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Mark J. Dalberth

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  • Somerville, MA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Atomic Layer Deposition Head
    • Publication number 20160115596
    • Publication date Apr 28, 2016
    • Ultratech, Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR HIGH-VELOCITY AND ATMOSPHERIC-PRESSURE ATOMIC LAYER DEPO...
    • Publication number 20150275363
    • Publication date Oct 1, 2015
    • Ultratech, Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD COATING SYSTEM
    • Publication number 20120141676
    • Publication date Jun 7, 2012
    • Cambridge NanoTech Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PRECURSOR DELIVERY
    • Publication number 20110311726
    • Publication date Dec 22, 2011
    • Cambridge NanoTech Inc.
    • Guo Liu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...