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Mark J. Sowa

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  • Medford, MA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma Enhanced ALD System
    • Publication number 20190284689
    • Publication date Sep 19, 2019
    • Ultratech, Inc.
    • Mark Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PE-ALD METHODS WITH REDUCED QUARTZ-BASED CONTAMINATION
    • Publication number 20170241019
    • Publication date Aug 24, 2017
    • Ultratech, Inc.
    • Mark J. Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    IMPROVED THROUGH SILICON VIA
    • Publication number 20170194204
    • Publication date Jul 6, 2017
    • Ultratech, Inc.
    • Mark Sowa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ENHANCED ALD SYSTEM
    • Publication number 20160281223
    • Publication date Sep 29, 2016
    • Ultratech, Inc.
    • Mark Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Radical-enhanced atomic layer deposition using CF4 to enhance oxyge...
    • Publication number 20160064208
    • Publication date Mar 3, 2016
    • Ultratech, Inc.
    • Arthur W. Zafiropoulo
    • H01 - BASIC ELECTRIC ELEMENTS