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Mark J. Willey
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Portland, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Wetting pretreatment for enhanced damascene metal filling
Patent number
10,840,101
Issue date
Nov 17, 2020
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Wetting pretreatment for enhanced damascene metal filling
Patent number
9,852,913
Issue date
Dec 26, 2017
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method and apparatus for electroplating semiconductor wafer when co...
Patent number
9,816,196
Issue date
Nov 14, 2017
Novellus Systems, Inc.
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Apparatus for wetting pretreatment for enhanced damascene metal fil...
Patent number
9,721,800
Issue date
Aug 1, 2017
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Through silicon via filling using an electrolyte with a dual state...
Patent number
9,593,426
Issue date
Mar 14, 2017
Novellus Systems, Inc.
Mark J. Willey
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Through silicon via filling using an electrolyte with a dual state...
Patent number
8,992,757
Issue date
Mar 31, 2015
Novellus Systems, Inc.
Mark J. Willey
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Wetting pretreatment for enhanced damascene metal filling
Patent number
8,962,085
Issue date
Feb 24, 2015
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Process for through silicon via filling
Patent number
8,722,539
Issue date
May 13, 2014
Novellus Systems, Inc.
Jonathan D. Reid
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Systems and methods for monitoring plating and etching baths
Patent number
8,475,642
Issue date
Jul 2, 2013
The Trustees of Columbia University In the City of New York
Alan C. West
G01 - MEASURING TESTING
Information
Patent Grant
Monitoring of electroplating additives
Patent number
8,372,258
Issue date
Feb 12, 2013
Novellus Systems, Inc.
Mark J. Willey
G01 - MEASURING TESTING
Information
Patent Grant
Process for through silicon via filing
Patent number
7,776,741
Issue date
Aug 17, 2010
Novellus Systems, Inc.
Jonathan D. Reid
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WETTING PRETREATMENT FOR ENHANCED DAMASCENE METAL FILLING
Publication number
20180138044
Publication date
May 17, 2018
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...
Publication number
20180030611
Publication date
Feb 1, 2018
Novellus Systems, Inc.
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
WETTING PRETREATMENT FOR ENHANCED DAMASCENE METAL FILLING
Publication number
20150179458
Publication date
Jun 25, 2015
Novellus Systems, Inc.
Steven T. Mayer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THROUGH SILICON VIA FILLING USING AN ELECTROLYTE WITH A DUAL STATE...
Publication number
20150159289
Publication date
Jun 11, 2015
Novellus Systems, Inc.
Mark J. Willey
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
APPARATUS FOR WETTING PRETREATMENT FOR ENHANCED DAMASCENE METAL FIL...
Publication number
20150096883
Publication date
Apr 9, 2015
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...
Publication number
20130284604
Publication date
Oct 31, 2013
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
BY-PRODUCT MITIGATION IN THROUGH-SILICON-VIA PLATING
Publication number
20120064462
Publication date
Mar 15, 2012
Mark J. WILLEY
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
THROUGH SILICON VIA FILLING USING AN ELECTROLYTE WITH A DUAL STATE...
Publication number
20110284386
Publication date
Nov 24, 2011
Mark J. Willey
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Monitoring of electroplating additives
Publication number
20110025338
Publication date
Feb 3, 2011
Novellus Systems, Inc.
Mark J. Willey
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR WETTING PRETREATMENT FOR ENHANCED DAMASCENE METAL FIL...
Publication number
20100320081
Publication date
Dec 23, 2010
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
WETTING PRETREATMENT FOR ENHANCED DAMASCENE METAL FILLING
Publication number
20100320609
Publication date
Dec 23, 2010
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Process For Through Silicon Via Filing
Publication number
20100041226
Publication date
Feb 18, 2010
Novellus Systems, Inc.
Jonathan D. Reid
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Systems And Methods For Monitoring Plating And Etching Baths
Publication number
20080264801
Publication date
Oct 30, 2008
Alan C. West
G01 - MEASURING TESTING