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Mark Lambert
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Ipswich, MA, US
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last 30 patents
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Patent Grant
Ion beam angle calibration and emittance measurement system for rib...
Patent number
8,168,941
Issue date
May 1, 2012
Axcelis Technologies, Inc.
Marvin Farley
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIB...
Publication number
20100181470
Publication date
Jul 22, 2010
Axcelis Technologies, Inc.
Marvin Farley
H01 - BASIC ELECTRIC ELEMENTS