Mark Leonard O'Neill

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
High oxide film removal rate shallow trench (STI) chemical mechanic...
- Patent number 12,091,581
- Issue date Sep 17, 2024
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions and processes for depositing carbon-doped silicon-cont...
- Patent number 11,725,111
- Issue date Aug 15, 2023
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low oxide trench dishing chemical mechanical polishing
- Patent number 11,692,110
- Issue date Jul 4, 2023
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low oxide trench dishing chemical mechanical polishing
- Patent number 11,667,839
- Issue date Jun 6, 2023
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tungsten chemical mechanical polishing for reduced oxide erosion
- Patent number 11,643,599
- Issue date May 9, 2023
- VERSUM MATERIALS US, LLC
- Chun Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods for making silicon containing films
- Patent number 11,626,279
- Issue date Apr 11, 2023
- VERSUM MATERIALS US, LLC
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shallow trench isolation (STI) chemical mechanical planarization (C...
- Patent number 11,608,451
- Issue date Mar 21, 2023
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Oxide chemical mechanical planarization (CMP) polishing compositions
- Patent number 11,549,034
- Issue date Jan 10, 2023
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical mechanical planarization (CMP) composition and methods the...
- Patent number 11,401,441
- Issue date Aug 2, 2022
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shallow trench isolation (STI) chemical mechanical planarization (C...
- Patent number 11,326,076
- Issue date May 10, 2022
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Low oxide trench dishing shallow trench isolation chemical mechanic...
- Patent number 11,254,839
- Issue date Feb 22, 2022
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suppressing SiN removal rates and reducing oxide trench dishing for...
- Patent number 11,180,678
- Issue date Nov 23, 2021
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 11,139,162
- Issue date Oct 5, 2021
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low oxide trench dishing chemical mechanical polishing
- Patent number 11,078,417
- Issue date Aug 3, 2021
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low oxide trench dishing chemical mechanical polishing
- Patent number 11,072,726
- Issue date Jul 27, 2021
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature atomic layer deposition of silicon oxide thin films
- Patent number 10,991,571
- Issue date Apr 27, 2021
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal chemical mechanical planarization (CMP) composition and metho...
- Patent number 10,920,106
- Issue date Feb 16, 2021
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Composite particles, method of refining and use thereof
- Patent number 10,894,906
- Issue date Jan 19, 2021
- VERSUM MATERIALS US, LLC
- Hongjun Zhou
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing (CMP) of cobalt-containing substrate
- Patent number 10,745,589
- Issue date Aug 18, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite abrasive particles for chemical mechanical planarization...
- Patent number 10,669,449
- Issue date Jun 2, 2020
- VERSUM MATERIALS US, LLC
- Hongjun Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal chemical mechanical planarization (CMP) composition and metho...
- Patent number 10,465,096
- Issue date Nov 5, 2019
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 10,460,929
- Issue date Oct 29, 2019
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 10,453,675
- Issue date Oct 22, 2019
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Composite particles, method of refining and use thereof
- Patent number 10,421,890
- Issue date Sep 24, 2019
- VERSUM MATERIALS US, LLC
- Hongjun Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and processes for depositing carbon-doped silicon-cont...
- Patent number 10,319,584
- Issue date Jun 11, 2019
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier materials for display devices
- Patent number 10,319,862
- Issue date Jun 11, 2019
- VERSUM MATERIALS US, LLC
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 10,283,350
- Issue date May 7, 2019
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
High temperature atomic layer deposition of silicon oxide thin films
- Patent number 10,242,864
- Issue date Mar 26, 2019
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing (CMP) of cobalt-containing substrate
- Patent number 10,217,645
- Issue date Feb 26, 2019
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite abrasive particles for chemical mechanical planarization...
- Patent number 10,109,493
- Issue date Oct 23, 2018
- VERSUM MATERIALS US, LLC
- Hongjun Zhou
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...
- Publication number 20230348736
- Publication date Nov 2, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PAD-IN-A-BOTTLE (PIB) TECHNOLOGY FOR COPPER AND THROUGH-SILICON VIA...
- Publication number 20230287242
- Publication date Sep 14, 2023
- VERSUM MATERIALS US, LLC
- XIAOBO SHI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Low Dishing Oxide CMP Polishing Compositions For Shallow Trench Iso...
- Publication number 20230193079
- Publication date Jun 22, 2023
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
High Oxide Film Removal Rate Shallow Trench (STI) Chemical Mechanic...
- Publication number 20230020073
- Publication date Jan 19, 2023
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- B24 - GRINDING POLISHING
Information Patent Application
Selective Chemical Mechanical Planarization Polishing
- Publication number 20220195245
- Publication date Jun 23, 2022
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...
- Publication number 20220041870
- Publication date Feb 10, 2022
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...
- Publication number 20210407793
- Publication date Dec 30, 2021
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
- Publication number 20210324270
- Publication date Oct 21, 2021
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
- Publication number 20210309885
- Publication date Oct 7, 2021
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low Oxide Trench Dishing Shallow Trench Isolation Chemical Mechanic...
- Publication number 20210179890
- Publication date Jun 17, 2021
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Chemical Mechanical Polishing For Copper And Through Silicon Via Ap...
- Publication number 20200277514
- Publication date Sep 3, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shallow Trench Isolation (STI) Chemical Mechanical Planarization (C...
- Publication number 20200239736
- Publication date Jul 30, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shallow Trench Isolation (STI) Chemical Mechanical Planarization (C...
- Publication number 20200239735
- Publication date Jul 30, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Suppressing SiN Removal Rates And Reducing Oxide Trench Dishing For...
- Publication number 20200131404
- Publication date Apr 30, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- B24 - GRINDING POLISHING
Information Patent Application
Composite Abrasive Particles for Chemical Mechanical Planarization...
- Publication number 20200115590
- Publication date Apr 16, 2020
- VERSUM MATERIALS US, LLC
- Hongjun Zhou
- B24 - GRINDING POLISHING
Information Patent Application
High Oxide VS Nitride Selectivity, Low And Uniform Oxide Trench Dis...
- Publication number 20200095502
- Publication date Mar 26, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Oxide Chemical Mechanical Planarization (CMP) Polishing Compositions
- Publication number 20200048496
- Publication date Feb 13, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Organoaminosilane Precursors And Methods For Depositing Films Compr...
- Publication number 20200051811
- Publication date Feb 13, 2020
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal Chemical Mechanical Planarization (CMP) Composition And Metho...
- Publication number 20200032107
- Publication date Jan 30, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Tungsten Chemical Mechanical Polishing For Reduced Oxide Erosion
- Publication number 20200024515
- Publication date Jan 23, 2020
- VERSUM MATERIALS US, LLC
- Chun Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
- Publication number 20200002607
- Publication date Jan 2, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
- Publication number 20200002608
- Publication date Jan 2, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
- Publication number 20200002574
- Publication date Jan 2, 2020
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Tungsten Chemical Mechanical Polishing Compositions
- Publication number 20190382619
- Publication date Dec 19, 2019
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Composite Particles, Method of Refining And Use Thereof
- Publication number 20190359868
- Publication date Nov 28, 2019
- VERSUM MATERIALS US, LLC
- Hongjun Zhou
- B24 - GRINDING POLISHING
Information Patent Application
Chemical Mechanical Polishing Tungsten Buffing Slurries
- Publication number 20190352535
- Publication date Nov 21, 2019
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compositions and Processes for Depositing Carbon-Doped Silicon-Cont...
- Publication number 20190287798
- Publication date Sep 19, 2019
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Atomic Layer Deposition of Silicon Oxide Thin Films
- Publication number 20190189431
- Publication date Jun 20, 2019
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical Mechanical Polishing (CMP) of Cobalt-Containing Substrate
- Publication number 20190172720
- Publication date Jun 6, 2019
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Metal Chemical Mechanical Planarization (CMP) Composition and Metho...
- Publication number 20190062597
- Publication date Feb 28, 2019
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Mark Leonard O'Neill

Person

Patents Grantslast 30 patents

High oxide film removal rate shallow trench (STI) chemical mechanic...

Compositions and processes for depositing carbon-doped silicon-cont...

Low oxide trench dishing chemical mechanical polishing

Low oxide trench dishing chemical mechanical polishing

Tungsten chemical mechanical polishing for reduced oxide erosion

Compositions and methods for making silicon containing films

Shallow trench isolation (STI) chemical mechanical planarization (C...

Oxide chemical mechanical planarization (CMP) polishing compositions

Chemical mechanical planarization (CMP) composition and methods the...

Shallow trench isolation (STI) chemical mechanical planarization (C...

Low oxide trench dishing shallow trench isolation chemical mechanic...

Suppressing SiN removal rates and reducing oxide trench dishing for...

Organoaminosilane precursors and methods for depositing films compr...

Low oxide trench dishing chemical mechanical polishing

Low oxide trench dishing chemical mechanical polishing

High temperature atomic layer deposition of silicon oxide thin films

Metal chemical mechanical planarization (CMP) composition and metho...

Composite particles, method of refining and use thereof

Chemical mechanical polishing (CMP) of cobalt-containing substrate

Composite abrasive particles for chemical mechanical planarization...

Metal chemical mechanical planarization (CMP) composition and metho...

Organoaminosilane precursors and methods for depositing films compr...

Organoaminosilane precursors and methods for depositing films compr...

Composite particles, method of refining and use thereof

Compositions and processes for depositing carbon-doped silicon-cont...

Barrier materials for display devices

Methods for depositing films with organoaminodisilane precursors

High temperature atomic layer deposition of silicon oxide thin films

Chemical mechanical polishing (CMP) of cobalt-containing substrate

Composite abrasive particles for chemical mechanical planarization...

Patents Applicationslast 30 patents

COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...

PAD-IN-A-BOTTLE (PIB) TECHNOLOGY FOR COPPER AND THROUGH-SILICON VIA...

Low Dishing Oxide CMP Polishing Compositions For Shallow Trench Iso...

High Oxide Film Removal Rate Shallow Trench (STI) Chemical Mechanic...

Selective Chemical Mechanical Planarization Polishing

COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...

ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...

Low Oxide Trench Dishing Chemical Mechanical Polishing

Low Oxide Trench Dishing Chemical Mechanical Polishing

Low Oxide Trench Dishing Shallow Trench Isolation Chemical Mechanic...

Chemical Mechanical Polishing For Copper And Through Silicon Via Ap...

Shallow Trench Isolation (STI) Chemical Mechanical Planarization (C...

Shallow Trench Isolation (STI) Chemical Mechanical Planarization (C...

Suppressing SiN Removal Rates And Reducing Oxide Trench Dishing For...

Composite Abrasive Particles for Chemical Mechanical Planarization...

High Oxide VS Nitride Selectivity, Low And Uniform Oxide Trench Dis...

Oxide Chemical Mechanical Planarization (CMP) Polishing Compositions

Organoaminosilane Precursors And Methods For Depositing Films Compr...

Metal Chemical Mechanical Planarization (CMP) Composition And Metho...

Tungsten Chemical Mechanical Polishing For Reduced Oxide Erosion

Low Oxide Trench Dishing Chemical Mechanical Polishing

Low Oxide Trench Dishing Chemical Mechanical Polishing

Low Oxide Trench Dishing Chemical Mechanical Polishing

Tungsten Chemical Mechanical Polishing Compositions

Composite Particles, Method of Refining And Use Thereof

Chemical Mechanical Polishing Tungsten Buffing Slurries

Compositions and Processes for Depositing Carbon-Doped Silicon-Cont...

High Temperature Atomic Layer Deposition of Silicon Oxide Thin Films

Chemical Mechanical Polishing (CMP) of Cobalt-Containing Substrate

Metal Chemical Mechanical Planarization (CMP) Composition and Metho...