Mark M. Hytros

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Lakw In The Hills, IL, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for plasma assisted deposition
- Patent number 7,779,784
- Issue date Aug 24, 2010
- Applied Materials, Inc.
- Chen-An Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for plasma assisted deposition
- Patent number 6,998,014
- Issue date Feb 14, 2006
- Applied Materials, Inc.
- Chen-An Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead assembly for a processing chamber
- Patent number 6,827,815
- Issue date Dec 7, 2004
- Applied Materials, Inc.
- Mark M. Hytros
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for plasma assisted deposition
- Publication number 20060075966
- Publication date Apr 13, 2006
- APPLIED MATERIALS, INC.
- Chen-An Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for plasma assisted deposition
- Publication number 20030143328
- Publication date Jul 31, 2003
- APPLIED MATERIALS, INC.
- Chen-An Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead assembly for a processing chamber
- Publication number 20030132319
- Publication date Jul 17, 2003
- Mark M. Hytros
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual-gas delivery system for chemical vapor deposition processes
- Publication number 20030124842
- Publication date Jul 3, 2003
- APPLIED MATERIALS, INC.
- Mark M. Hytros
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...