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Mark M. Stark
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Kamakura, JP
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last 30 patents
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Patent Grant
Xenon enhanced plasma etch
Patent number
4,786,359
Issue date
Nov 22, 1988
Tegal Corporation
Mark M. Stark
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Non-uniform gas inlet for dry etching apparatus
Patent number
4,780,169
Issue date
Oct 25, 1988
Tegal Corporation
Mark M. Stark
H01 - BASIC ELECTRIC ELEMENTS