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Mark Marcus Gerardus Heeren
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Eersel, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,114,300
Issue date
Oct 30, 2018
ASML Netherlands B.V.
Henrikus Herman Marie Cox
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150212435
Publication date
Jul 30, 2015
ASML NETHERLANDS B.V,
Henrikus Herman Marie Cox
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER