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Mark Mayeda
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Portland, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Residual oxygen reduction system
Patent number
6,635,116
Issue date
Oct 21, 2003
LSI Logic Corporation
Mark I. Mayeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cooling element for a semiconductor fabrication chamber
Patent number
5,942,038
Issue date
Aug 24, 1999
LSI Logic Corporation
Mark Mayeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a layer of material on a wafer
Patent number
5,635,244
Issue date
Jun 3, 1997
LSI Logic Corporation
Mark I. Mayeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Leak detection system for a gas manifold of a chemical vapor deposi...
Patent number
5,614,249
Issue date
Mar 25, 1997
LSI Logic Corporation
Mark I. Mayeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cooling element for a semiconductor fabrication chamber
Patent number
5,497,727
Issue date
Mar 12, 1996
LSI Logic Corporation
Mark Mayeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Wafer cooling chuck with direct coupled peltier unit
Publication number
20040248430
Publication date
Dec 9, 2004
Rennie Barber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Residual oxygen reduction system
Publication number
20040086430
Publication date
May 6, 2004
LSI Logic Corporation
Mark I. Mayeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...