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MARK NOKES
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PALO ALTO, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Detection system for nanometer scale topographic measurements of re...
Patent number
8,384,903
Issue date
Feb 26, 2013
KLA-Tencor Corporation
Henrik K. Nielsen
G01 - MEASURING TESTING
Information
Patent Grant
Detection system for nanometer scale topographic measurements of re...
Patent number
7,342,672
Issue date
Mar 11, 2008
KLA-Tencor Corporation
Henrik K. Nielsen
G01 - MEASURING TESTING
Information
Patent Grant
Detection system for nanometer scale topographic measurements of re...
Patent number
6,999,183
Issue date
Feb 14, 2006
KLA-Tencor Corporation
Henrik K. Nielsen
G01 - MEASURING TESTING
Information
Patent Grant
High sensitivity, large detection area particle sensor for vacuum a...
Patent number
5,266,798
Issue date
Nov 30, 1993
High Yield Technology
Peter Borden
G01 - MEASURING TESTING
Information
Patent Grant
Low cost stage for raster scanning of semiconductor wafers
Patent number
5,212,580
Issue date
May 18, 1993
High Yield Technology
George L. Coad
G02 - OPTICS
Information
Patent Grant
High sensitivity, large detection area particle sensor for vacuum a...
Patent number
5,132,548
Issue date
Jul 21, 1992
High Yield Technology
Peter Borden
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Detection system for nanometer scale topographic measurements of re...
Publication number
20080225275
Publication date
Sep 18, 2008
KLA-Tencor Corporation
HENRIK K. NIELSEN
G01 - MEASURING TESTING
Information
Patent Application
Detection system for nanometer scale topographic measurements of re...
Publication number
20060092427
Publication date
May 4, 2006
Henrik K. Nielsen
G01 - MEASURING TESTING
Information
Patent Application
DETECTION SYSTEM FOR NANOMETER SCALE TOPOGRAPHIC MEASUREMENTS OF RE...
Publication number
20010013936
Publication date
Aug 16, 2001
KLA-Tencor Corporation
HENRIK K. NIELSEN
G01 - MEASURING TESTING