Mark R. Lewis

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Oceanside, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Laser discharge chamber passivation by plasma
- Patent number 6,914,927
- Issue date Jul 5, 2005
- Cymer, Inc.
- Tom A. Watson
- B08 - CLEANING
Information Patent Grant
Laser discharge chamber passivation by plasma
- Patent number 6,644,324
- Issue date Nov 11, 2003
- Cymer, Inc.
- Tom A. Watson
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
HIGH STABILITY REFLECTIVE ELEMENT MOUNT
- Publication number 20120057254
- Publication date Mar 8, 2012
- Daylight Solutions, Inc.
- David F. Arnone
- G02 - OPTICS
Information Patent Application
Laser discharge chamber passivation by plasma
- Publication number 20040037339
- Publication date Feb 26, 2004
- Tom A. Watson
- B08 - CLEANING