Mark S. WANG

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating a high-pressure laser-sustained-plasma lamp
- Patent number 11,923,185
- Issue date Mar 5, 2024
- KLA Corporation
- Mark S. Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multimode defect classification in semiconductor inspection
- Patent number 11,668,655
- Issue date Jun 6, 2023
- KLA Corporation
- Vaibhav Gaind
- G01 - MEASURING TESTING
Information Patent Grant
Conical pocket laser-sustained plasma lamp
- Patent number 11,637,008
- Issue date Apr 25, 2023
- KLA Corporation
- Sumeet Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-mirror laser sustained plasma light source
- Patent number 10,811,158
- Issue date Oct 20, 2020
- KLA Corporation
- Qibiao Chen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Sensor with electrically controllable aperture for inspection and m...
- Patent number 10,194,108
- Issue date Jan 29, 2019
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Interleaved acousto-optical device scanning for suppression of opti...
- Patent number 10,060,884
- Issue date Aug 28, 2018
- KLA-Tencor Corporation
- Jamie Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Confocal line inspection optical system
- Patent number 9,927,371
- Issue date Mar 27, 2018
- KLA-Tencor Corporation
- Mark S. Wang
- G02 - OPTICS
Information Patent Grant
Sensor with electrically controllable aperture for inspection and m...
- Patent number 9,860,466
- Issue date Jan 2, 2018
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Oblique illuminator for inspecting manufactured substrates
- Patent number 9,423,357
- Issue date Aug 23, 2016
- KLA-Tencor Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Interleaved acousto-optical device scanning for suppression of opti...
- Patent number 9,395,340
- Issue date Jul 19, 2016
- KLA-Tencor Corporation
- Jamie Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Variable polarization wafer inspection
- Patent number 9,239,295
- Issue date Jan 19, 2016
- KLA-Tencor Corp.
- Xianzhao Peng
- G01 - MEASURING TESTING
Information Patent Grant
Capsule imaging system having a folded optical axis
- Patent number 9,001,187
- Issue date Apr 7, 2015
- CapsoVision, Inc.
- Gordon Cook Wilson
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Oblique illuminator for inspecting manufactured substrates
- Patent number 8,794,801
- Issue date Aug 5, 2014
- KLA-Tencor Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FABRICATING A HIGH-PRESSURE LASER-SUSTAINED-PLASMA LAMP
- Publication number 20220406553
- Publication date Dec 22, 2022
- Mark S. Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL IMAGING WITH ENHANCED RESOLUTION
- Publication number 20220252512
- Publication date Aug 11, 2022
- Xiumei Liu
- G01 - MEASURING TESTING
Information Patent Application
Multimode Defect Classification in Semiconductor Inspection
- Publication number 20200025689
- Publication date Jan 23, 2020
- KLA-Tencor Corporation
- Vaibhav Gaind
- G01 - MEASURING TESTING
Information Patent Application
Sensor With Electrically Controllable Aperture For Inspection And M...
- Publication number 20180070040
- Publication date Mar 8, 2018
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G01 - MEASURING TESTING
Information Patent Application
Sensor With Electrically Controllable Aperture For Inspection And M...
- Publication number 20160334342
- Publication date Nov 17, 2016
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G01 - MEASURING TESTING
Information Patent Application
Interleaved Acousto-Optical Device Scanning For Suppression Of Opti...
- Publication number 20160290971
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Jamie Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Confocal Line Inspection Optical System
- Publication number 20150369750
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Mark S. Wang
- G02 - OPTICS
Information Patent Application
OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES
- Publication number 20140299779
- Publication date Oct 9, 2014
- KLA-Tencor Corporation
- Shiyu ZHANG
- G01 - MEASURING TESTING
Information Patent Application
Interleaved Acousto-Optical Device Scanning For Suppression Of Opti...
- Publication number 20140260640
- Publication date Sep 18, 2014
- KLA-Tencor Corporation Drive
- Jamie Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Variable Polarization Wafer Inspection
- Publication number 20130265577
- Publication date Oct 10, 2013
- KLA-Tencor Corporation
- Xianzhao Peng
- G01 - MEASURING TESTING
Information Patent Application
OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES
- Publication number 20120218545
- Publication date Aug 30, 2012
- KLA-Tencor Corporation
- Shiyu Zhang
- G01 - MEASURING TESTING
Information Patent Application
IMAGING SYSTEM HAVING A FOLDED OPTICAL AXIS
- Publication number 20110001789
- Publication date Jan 6, 2011
- CAPSO VISION INC.
- Gordon Wilson
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Mark S. WANG

Person

Patents Grantslast 30 patents

Method of fabricating a high-pressure laser-sustained-plasma lamp

Multimode defect classification in semiconductor inspection

Conical pocket laser-sustained plasma lamp

Multi-mirror laser sustained plasma light source

Sensor with electrically controllable aperture for inspection and m...

Interleaved acousto-optical device scanning for suppression of opti...

Confocal line inspection optical system

Sensor with electrically controllable aperture for inspection and m...

Oblique illuminator for inspecting manufactured substrates

Interleaved acousto-optical device scanning for suppression of opti...

Variable polarization wafer inspection

Capsule imaging system having a folded optical axis

Oblique illuminator for inspecting manufactured substrates

Patents Applicationslast 30 patents

METHOD OF FABRICATING A HIGH-PRESSURE LASER-SUSTAINED-PLASMA LAMP

THREE-DIMENSIONAL IMAGING WITH ENHANCED RESOLUTION

Multimode Defect Classification in Semiconductor Inspection

Sensor With Electrically Controllable Aperture For Inspection And M...

Sensor With Electrically Controllable Aperture For Inspection And M...

Interleaved Acousto-Optical Device Scanning For Suppression Of Opti...

Confocal Line Inspection Optical System

OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES

Interleaved Acousto-Optical Device Scanning For Suppression Of Opti...

Variable Polarization Wafer Inspection

OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES

IMAGING SYSTEM HAVING A FOLDED OPTICAL AXIS