Mark Tan

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum robot positioning system with reduced sensitivity to chamber...
- Patent number 10,483,142
- Issue date Nov 19, 2019
- Lam Research Corporation
- Mark K. Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass damper for semiconductor wafer handling end effector
- Patent number 8,985,935
- Issue date Mar 24, 2015
- Novellus Systems, Inc.
- Mark K. Tan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method and apparatus for damping vibrations in a semiconductor wafe...
- Patent number 6,976,400
- Issue date Dec 20, 2005
- Novellus Systems, Inc.
- Mark Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for damping vibrations in a semiconductor wafe...
- Patent number 6,761,085
- Issue date Jul 13, 2004
- Novellus Systems Incorporated
- Mark Tan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MASS DAMPER FOR SEMICONDUCTOR WAFER HANDLING END EFFECTOR
- Publication number 20130213169
- Publication date Aug 22, 2013
- Mark K. Tan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS