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Mark Van Heumen
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Zwijndrecht, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,995,379
Issue date
Feb 7, 2006
ASML Netherlands B.V.
Petrus Matthijs Henricus Vosters
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20040031932
Publication date
Feb 19, 2004
ASML NETHERLANDS B.V.
Petrus Matthijs Henricus Vosters
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY