Mark Wiltse

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Redwood City, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Process condition measuring device
- Patent number 8,104,342
- Issue date Jan 31, 2012
- KLA-Tencor Corporation
- Mei H. Sun
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Temperature effects on overlay accuracy
- Patent number 7,924,408
- Issue date Apr 12, 2011
- KLA-Tencor Technologies Corporation
- Tony DiBiase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for transferring and supporting a substrate
- Patent number 6,537,011
- Issue date Mar 25, 2003
- Applied Materials, Inc.
- Danny Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for measuring pedestal temperature in a semiconductor waf...
- Patent number 5,893,643
- Issue date Apr 13, 1999
- Applied Materials, Inc.
- Ajay Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching transistor gates using a hardmask
- Patent number 5,851,926
- Issue date Dec 22, 1998
- Applied Materials, Inc.
- Ajay Kumar
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESS CONDITION MEASURING DEVICE
- Publication number 20130029433
- Publication date Jan 31, 2013
- KLA-Tencor Corporation
- Mei H. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface Coating
- Publication number 20100080957
- Publication date Apr 1, 2010
- Integrated Surface Technologies
- Jeffrey D. CHINN
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PROCESS CONDITION MEASURING DEVICE
- Publication number 20090056441
- Publication date Mar 5, 2009
- KLA-Tencor Corporation
- Mei H. Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Temperature effects on overlay accuracy
- Publication number 20080204678
- Publication date Aug 28, 2008
- KLA-Tencor Technologies Corporation
- Tony DiBiase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stylus having variable reflectivity and method for data input there...
- Publication number 20040140963
- Publication date Jul 22, 2004
- David Kim
- G06 - COMPUTING CALCULATING COUNTING