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Reaction system for growing a thin film
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Patent number 10,468,291
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Issue date Nov 5, 2019
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ASM America, Inc.
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Mohith Verghese
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Reaction system for growing a thin film
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Patent number 9,359,672
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Issue date Jun 7, 2016
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ASM America, Inc.
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Mohith Verghese
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Reaction system for growing a thin film
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Patent number 8,211,230
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Issue date Jul 3, 2012
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ASM America, Inc.
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Mohith Verghese
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...