Marko PEUSSA

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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical device with stopper
- Patent number 11,685,644
- Issue date Jun 27, 2023
- Murata Manufacturing Co., Ltd.
- Marko Peussa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS element with increased density
- Patent number 11,603,312
- Issue date Mar 14, 2023
- Murata Manufacturing Co., Ltd.
- Marko Peussa
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH STOPPER
- Publication number 20210188621
- Publication date Jun 24, 2021
- Murata Manufacturing Co., Ltd.
- Marko PEUSSA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT WITH INCREASED DENSITY
- Publication number 20210122628
- Publication date Apr 29, 2021
- Murata Manufacturing Co., Ltd.
- Marko PEUSSA
- B81 - MICRO-STRUCTURAL TECHNOLOGY