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Marko Swoboda
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Solid body and multi-component arrangement
Patent number
12,211,702
Issue date
Jan 28, 2025
Siltectra GmbH
Wolfram Drescher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing wafers with modification lines of defined orie...
Patent number
12,159,805
Issue date
Dec 3, 2024
Siltectra GmbH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Device and method for applying pressure to stress-producing layers...
Patent number
12,151,314
Issue date
Nov 26, 2024
Siltectra GmbH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for producing at least one modification in a s...
Patent number
12,107,017
Issue date
Oct 1, 2024
Infineon Technologies AG
Ralf Rieske
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a crack in an edge region of a donor substrate
Patent number
12,097,641
Issue date
Sep 24, 2024
Siltectra GmbH
Marko David Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for separating wafers from donor substrates
Patent number
12,030,216
Issue date
Jul 9, 2024
Siltectra GmbH
Marko David Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for reducing the thickness of solid-state layers provided wi...
Patent number
11,869,810
Issue date
Jan 9, 2024
Siltectra GmbH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser conditioning of solid bodies using prior knowledge from previ...
Patent number
11,822,307
Issue date
Nov 21, 2023
Siltectra GmbH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Production facility for separating wafers from donor substrates
Patent number
11,787,083
Issue date
Oct 17, 2023
Siltectra GmbH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for separating solid body layers from composite structures m...
Patent number
11,772,201
Issue date
Oct 3, 2023
Siltectra GmbH
Jan Richter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Parent substrate, wafer composite and methods of manufacturing crys...
Patent number
11,712,749
Issue date
Aug 1, 2023
Infineon Technologies AG
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for thinning solid-body layers provided with components
Patent number
11,664,277
Issue date
May 30, 2023
Siltectra GmbH
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods for processing a semiconductor substrate
Patent number
11,557,506
Issue date
Jan 17, 2023
Infineon Technologies AG
Werner Schustereder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for producing at least one modification in a s...
Patent number
11,551,981
Issue date
Jan 10, 2023
Infineon Technologies AG
Ralf Rieske
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for modifying substrates based on crystal lattice dislocatio...
Patent number
11,309,191
Issue date
Apr 19, 2022
Siltectra GmbH
Christian Beyer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Combined laser treatment of a solid body to be split
Patent number
11,130,200
Issue date
Sep 28, 2021
Siltectra GmbH
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for splitting semiconductor wafers
Patent number
11,081,393
Issue date
Aug 3, 2021
Infineon Technologies AG
Christian Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for producing planar modifications in solid bodies
Patent number
11,059,202
Issue date
Jul 13, 2021
Siltectra GmbH
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for forming a crack in the edge region of a donor substrate,...
Patent number
10,994,442
Issue date
May 4, 2021
Siltectra GmbH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for thinning solid body layers provided with components
Patent number
10,978,311
Issue date
Apr 13, 2021
Siltectra GmbH
Wolfram Drescher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polymer hybrid material for use in a splitting method
Patent number
10,858,495
Issue date
Dec 8, 2020
Siltectra GmbH
Christian Beyer
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Method for guiding a crack in the peripheral region of a donor subs...
Patent number
10,676,386
Issue date
Jun 9, 2020
Siltectra GmbH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for guiding a crack in the peripheral region of a donor subs...
Patent number
10,280,107
Issue date
May 7, 2019
Siltectra, GmbH
Marko Swoboda
B28 - WORKING CEMENT, CLAY, OR STONE
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE MODIFICATION IN A S...
Publication number
20240413023
Publication date
Dec 12, 2024
INFINEON TECHNOLOGIES AG
Ralf RIESKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Separating Wafers from Donor Substrates
Publication number
20230390961
Publication date
Dec 7, 2023
SILTECTRA GMBH
Marko David Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Parent Substrate, Wafer Composite and Methods of Manufacturing Crys...
Publication number
20230330769
Publication date
Oct 19, 2023
INFINEON TECHNOLOGIES AG
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE MODIFICATION IN A S...
Publication number
20230093945
Publication date
Mar 30, 2023
INFINEON TECHNOLOGIES AG
Ralf RIESKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Forming a Semiconductor Device Including an Absorption Layer
Publication number
20230092013
Publication date
Mar 23, 2023
INFINEON TECHNOLOGIES AG
Hans-Joachim Schulze
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SPLITTING SEMICONDUCTOR WAFERS
Publication number
20230005794
Publication date
Jan 5, 2023
INFINEON TECHNOLOGIES AG
Christian Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SEPARATING A SOLID-STATE LAYER FROM A SOLID-STATE MATERIAL
Publication number
20210299910
Publication date
Sep 30, 2021
SILTECTRA GMBH
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for Thinning Solid-Body Layers Provided with Components
Publication number
20210225709
Publication date
Jul 22, 2021
SILTECTRA GMBH
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Solid Body and Multi-Component Arrangement
Publication number
20210225659
Publication date
Jul 22, 2021
Wolfram Drescher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING A CRACK IN AN EDGE REGION OF A DONOR SUBSTRATE
Publication number
20210213643
Publication date
Jul 15, 2021
Marko David Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for Reducing the Thickness of Solid-State Layers Provided wi...
Publication number
20210197314
Publication date
Jul 1, 2021
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for Splitting Semiconductor Wafers
Publication number
20210175123
Publication date
Jun 10, 2021
INFINEON TECHNOLOGIES AG
Christian Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
Publication number
20210159115
Publication date
May 27, 2021
INFINEON TECHNOLOGIES AG
Werner SCHUSTEREDER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Parent Substrate, Wafer Composite and Methods of Manufacturing Crys...
Publication number
20210053148
Publication date
Feb 25, 2021
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for Producing Short Subcritical Cracks in Solid Bodies
Publication number
20200398381
Publication date
Dec 24, 2020
SILTECTRA GMBH
Jan Richter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for Producing Wafers with Modification Lines of Defined Orie...
Publication number
20200388538
Publication date
Dec 10, 2020
SILTECTRA GMBH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE MODIFICATION IN A S...
Publication number
20200343147
Publication date
Oct 29, 2020
INFINEON TECHNOLOGIES AG
Ralf RIESKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Production Facility for Separating Wafers from Donor Substrates
Publication number
20200254650
Publication date
Aug 13, 2020
SILTECTRA GMBH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Device and Method for Applying Pressure to Stress-Producing Layers...
Publication number
20200215648
Publication date
Jul 9, 2020
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for Thinning Solid Body Layers Provided with Components
Publication number
20200066542
Publication date
Feb 27, 2020
SILTECTRA GMBH
Wolfram Drescher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Modifying Substrates Based on Crystal Lattice Dislocatio...
Publication number
20200051831
Publication date
Feb 13, 2020
Christian Beyer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND DEVICE FOR PRODUCING PLANAR MODIFICATIONS IN SOLID BODIES
Publication number
20190366586
Publication date
Dec 5, 2019
SILTECTRA GMBH
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for Separating Solid Body Layers from Composite Structures M...
Publication number
20190337100
Publication date
Nov 7, 2019
Jan Richter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser Conditioning of Solid Bodies Using Prior Knowledge from Previ...
Publication number
20190302725
Publication date
Oct 3, 2019
SILTECTRA GMBH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR GUIDING A CRACK IN THE PERIPHERAL REGION OF A DONOR SUBS...
Publication number
20190218131
Publication date
Jul 18, 2019
SILTECTRA GMBH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
COMBINED LASER TREATMENT OF A SOLID BODY TO BE SPLIT
Publication number
20190099838
Publication date
Apr 4, 2019
Ralf Rieske
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
POLYMER HYBRID MATERIAL FOR USE IN A SPLITTING METHOD
Publication number
20190071552
Publication date
Mar 7, 2019
SILTECTRA GMBH
Christian BEYER
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
METHOD FOR FORMING A CRACK IN THE EDGE REGION OF A DONOR SUBSTRATE,...
Publication number
20180370073
Publication date
Dec 27, 2018
SILTECTRA GMBH
Marko Swoboda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR GUIDING A CRACK IN THE PERIPHERAL REGION OF A DONOR SUBS...
Publication number
20180185957
Publication date
Jul 5, 2018
SILTECTRA GMBH
Marko Swoboda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS AND METHOD FOR CONTINUOUS TREATMENT OF A SOLID BODY BY ME...
Publication number
20180154572
Publication date
Jun 7, 2018
SILTECTRA GMBH
Jan Richter
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL