Markus Bauer

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for examining a beam of charged particles
- Patent number 11,961,705
- Issue date Apr 16, 2024
- Carl Zeiss SMT GmbH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for examining a measuring tip of a scanning pr...
- Patent number 11,680,963
- Issue date Jun 20, 2023
- Carl Zeiss SMT GmbH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 11,372,334
- Issue date Jun 28, 2022
- Carl Zeiss SMT GmbH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for determining a wavefront of a massive parti...
- Patent number 11,355,311
- Issue date Jun 7, 2022
- Carl Zeiss SMT GmbH
- Joachim Welte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for examining a measuring tip of a scanning pr...
- Patent number 11,237,187
- Issue date Feb 1, 2022
- Carl Zeiss SMT GmbH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Grant
Beam reverser module and optical power amplifier having such a beam...
- Patent number 10,777,958
- Issue date Sep 15, 2020
- Carl Zeiss SMT GmbH
- Michael Schall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 10,534,269
- Issue date Jan 14, 2020
- Carl Zeiss SMT GmbH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 10,481,501
- Issue date Nov 19, 2019
- Carl Zeiss SMT GmbH
- Markus Bauer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Polarizer assembly for spatially separation polarization states of...
- Patent number 10,394,041
- Issue date Aug 27, 2019
- Carl Zeiss SMT GmbH
- Markus Bauer
- F21 - LIGHTING
Information Patent Grant
Cooler for use in a device in a vacuum
- Patent number 10,303,067
- Issue date May 28, 2019
- Carl Zeiss SMT GmbH
- Willi Anderl
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Mirror, in particular collector mirror for microlithography
- Patent number 10,101,569
- Issue date Oct 16, 2018
- Carl Zeiss SMT GmbH
- Markus Bauer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Beam reverser module and optical power amplifier having such a beam...
- Patent number 9,843,153
- Issue date Dec 12, 2017
- Carl Zeiss SMT GmbH
- Michael Schall
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR ETCHING A LITHOGRAPHY MASK
- Publication number 20230185180
- Publication date Jun 15, 2023
- Carl Zeiss SMT GMBH
- Fan Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR REPAIRING A DEFECT OF A LITHOGRAPHIC MASK
- Publication number 20230152685
- Publication date May 18, 2023
- Carl Zeiss SMT GMBH
- Markus Bauer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR SETTING A SIDE WALL ANGLE OF A PATTERN ELE...
- Publication number 20230109566
- Publication date Apr 6, 2023
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...
- Publication number 20220107340
- Publication date Apr 7, 2022
- Carl Zeiss SMT GMBH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES
- Publication number 20210110996
- Publication date Apr 15, 2021
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING A WAVEFRONT OF A MASSIVE PARTI...
- Publication number 20200312613
- Publication date Oct 1, 2020
- Carl Zeiss SMT GMBH
- Joachim Welte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...
- Publication number 20200141972
- Publication date May 7, 2020
- Carl Zeiss SMT GMBH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...
- Publication number 20200096874
- Publication date Mar 26, 2020
- Carl Zeiss SMT GMBH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20180102620
- Publication date Apr 12, 2018
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS
Information Patent Application
METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...
- Publication number 20170315453
- Publication date Nov 2, 2017
- Carl Zeiss SMT GMBH
- Markus Bauer
- G02 - OPTICS
Information Patent Application
MIRROR, IN PARTICULAR COLLECTOR MIRROR FOR MICROLITHOGRAPHY
- Publication number 20170254995
- Publication date Sep 7, 2017
- Carl Zeiss SMT GMBH
- Markus Bauer
- G02 - OPTICS
Information Patent Application
COOLER FOR USE IN A DEVICE IN A VACUUM
- Publication number 20160299443
- Publication date Oct 13, 2016
- Carl Zeiss SMT GMBH
- Willi Anderl
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Polarizer Assembly For Spatially Separation Polarization States Of...
- Publication number 20160018664
- Publication date Jan 21, 2016
- Carl Zeiss SMT GMBH
- Markus Bauer
- G02 - OPTICS
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20150340829
- Publication date Nov 26, 2015
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS
Information Patent Application
COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE
- Publication number 20150083938
- Publication date Mar 26, 2015
- CARL ZEISS LASER OPTICS GmbH
- Willi Anderl
- G02 - OPTICS
Information Patent Application
EUV COLLECTOR MIRROR SHELL OF AN EUV COLLECTOR FOR EUV LITHOGRAPHY
- Publication number 20130176614
- Publication date Jul 11, 2013
- CARL ZEISS LASER OPTICS GmbH
- Willi Anderl
- G02 - OPTICS

Markus Bauer

Person

Patents Grantslast 30 patents

Method and apparatus for examining a beam of charged particles

Method and apparatus for examining a measuring tip of a scanning pr...

Method for producing a reflective optical element, reflective optic...

Method and apparatus for determining a wavefront of a massive parti...

Method and apparatus for examining a measuring tip of a scanning pr...

Beam reverser module and optical power amplifier having such a beam...

Method for producing a reflective optical element, reflective optic...

Method for producing a reflective optical element, reflective optic...

Polarizer assembly for spatially separation polarization states of...

Cooler for use in a device in a vacuum

Mirror, in particular collector mirror for microlithography

Beam reverser module and optical power amplifier having such a beam...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR ETCHING A LITHOGRAPHY MASK

METHOD AND APPARATUS FOR REPAIRING A DEFECT OF A LITHOGRAPHIC MASK

METHOD AND APPARATUS FOR SETTING A SIDE WALL ANGLE OF A PATTERN ELE...

METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...

METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES

METHOD AND APPARATUS FOR DETERMINING A WAVEFRONT OF A MASSIVE PARTI...

METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...

METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...

Beam Reverser Module and Optical Power Amplifier Having Such a Beam...

METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...

MIRROR, IN PARTICULAR COLLECTOR MIRROR FOR MICROLITHOGRAPHY

COOLER FOR USE IN A DEVICE IN A VACUUM

Polarizer Assembly For Spatially Separation Polarization States Of...

Beam Reverser Module and Optical Power Amplifier Having Such a Beam...

COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE

EUV COLLECTOR MIRROR SHELL OF AN EUV COLLECTOR FOR EUV LITHOGRAPHY