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Markus Bergmeister
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Villach, AT
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last 30 patents
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Patent Grant
Method with mechanical dicing process for producing MEMS components
Patent number
12,060,266
Issue date
Aug 13, 2024
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
METHOD WITH MECHANICAL DICING PROCESS FOR PRODUCING MEMS COMPONENTS
Publication number
20210253421
Publication date
Aug 19, 2021
INFINEON TECHNOLOGIES AG
Andre BROCKMEIER
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROELECTROMECHANICAL DEVICE AND A METHOD OF MANUFACTURING A MICRO...
Publication number
20170355591
Publication date
Dec 14, 2017
INFINEON TECHNOLOGIES AG
Ursula Hedenig
B81 - MICRO-STRUCTURAL TECHNOLOGY