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last 30 patents
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Patent Grant
Apparatus and method for processing particulate matter
Patent number
10,576,445
Issue date
Mar 3, 2020
Beneq Oy
Markus Bosund
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND METHOD
Publication number
20240352582
Publication date
Oct 24, 2024
BENEQ OY
Markus BOSUND
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...
Publication number
20240344197
Publication date
Oct 17, 2024
BENEQ OY
Markus BOSUND
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT
Publication number
20240337019
Publication date
Oct 10, 2024
BENEQ OY
Olli-Pekka SUHONEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING SURFACE OF A SEMICONDUCTOR SUBS...
Publication number
20220356561
Publication date
Nov 10, 2022
BENEQ OY
Mikko SÖDERLUND
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AN APPARATUS AND METHOD FOR PROCESSING PARTICULATE MATTER
Publication number
20190184363
Publication date
Jun 20, 2019
BENEQ OY
Markus Bosund
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD
Publication number
20190085449
Publication date
Mar 21, 2019
BENEQ OY
Markus BOSUND
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...