Markus Degünther

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination optical unit for a mask inspection system and mask ins...
- Patent number 10,042,248
- Issue date Aug 7, 2018
- Carl Zeiss SMT GmbH
- Markus Degünther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 9,046,787
- Issue date Jun 2, 2015
- Carl Zeiss SMT GmbH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diaphragm for an integrator unit
- Patent number 6,885,434
- Issue date Apr 26, 2005
- Carl Zeiss SMT AG
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A MASK INSPECTION SYSTEM AND MASK INS...
- Publication number 20150346598
- Publication date Dec 3, 2015
- Carl Zeiss SMT GMBH
- Markus Degünther
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20110109893
- Publication date May 12, 2011
- Carl Zeiss SMT AG
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Microlithographic Projection Exposure Apparatus
- Publication number 20080192224
- Publication date Aug 14, 2008
- Carl Zeiss SMT AG
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Diaphragm for an integrator unit
- Publication number 20040160591
- Publication date Aug 19, 2004
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY