Markus Deguenther

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for characterizing a microlithographic mask
- Patent number 11,914,303
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pupil facet mirror, illumination optics and optical system for a pr...
- Patent number 11,378,887
- Issue date Jul 5, 2022
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image sensor, position sensor device, lithography system, and metho...
- Patent number 11,262,660
- Issue date Mar 1, 2022
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pupil facet mirror, illumination optics and optical system for a pr...
- Patent number 11,061,334
- Issue date Jul 13, 2021
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus comprising a plurality of individually contro...
- Patent number 11,003,090
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Stefan Richter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical device for projection lithography
- Patent number 11,003,086
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical element for projection lithography
- Patent number 10,948,828
- Issue date Mar 16, 2021
- Carl Zeiss SMT GmbH
- Stig Bieling
- G02 - OPTICS
Information Patent Grant
Method and device for characterizing a mask for microlithography
- Patent number 10,698,318
- Issue date Jun 30, 2020
- Carl Zeiss SMT GmbH
- Holger Seitz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Facet mirror
- Patent number 10,599,041
- Issue date Mar 24, 2020
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection device and me...
- Patent number 10,539,883
- Issue date Jan 21, 2020
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating a microlithographic projection apparatus and il...
- Patent number 10,444,631
- Issue date Oct 15, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Microlithographic illumination unit
- Patent number 10,394,129
- Issue date Aug 27, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 10,281,823
- Issue date May 7, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lighting system of a microlithographic projection exposure system a...
- Patent number 10,274,828
- Issue date Apr 30, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical waveguide for guiding illumination light
- Patent number 10,254,466
- Issue date Apr 9, 2019
- Carl Zeiss SMT GmbH
- Christian Wald
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system having a beam deflection array for illuminating...
- Patent number 10,241,416
- Issue date Mar 26, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Facet mirror for an illumination optical unit for projection lithog...
- Patent number 10,216,091
- Issue date Feb 26, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 10,191,382
- Issue date Jan 29, 2019
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for projection lithography and hollow wav...
- Patent number 10,151,929
- Issue date Dec 11, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Microlithographic projection exposure apparatus having a multi-mirr...
- Patent number 10,146,135
- Issue date Dec 4, 2018
- Carl Zeiss SMT GmbH
- Michael Layh
- G02 - OPTICS
Information Patent Grant
Optical component
- Patent number 10,133,183
- Issue date Nov 20, 2018
- Carl Zeiss SMT GmbH
- Michael Patra
- G02 - OPTICS
Information Patent Grant
Illumination system for microlithography
- Patent number 10,088,754
- Issue date Oct 2, 2018
- Carl Zeiss SMT GmbH
- Axel Scholz
- G02 - OPTICS
Information Patent Grant
Beam distributing optical device and associated unit, system and ap...
- Patent number 10,061,203
- Issue date Aug 28, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for EUV projection lithography
- Patent number 10,018,917
- Issue date Jul 10, 2018
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system of a microlithographic projection exposure apparatus
- Patent number 10,012,907
- Issue date Jul 3, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method for controlling a projecti...
- Patent number 10,007,193
- Issue date Jun 26, 2018
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,983,483
- Issue date May 29, 2018
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,977,333
- Issue date May 22, 2018
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lighting system of a microlithographic projection exposure system a...
- Patent number 9,977,334
- Issue date May 22, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system for a microlithographic projection exposure apparatu...
- Patent number 9,946,161
- Issue date Apr 17, 2018
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20240152057
- Publication date May 9, 2024
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20210397099
- Publication date Dec 23, 2021
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PUPIL FACET MIRROR, ILLUMINATION OPTICS AND OPTICAL SYSTEM FOR A PR...
- Publication number 20210263420
- Publication date Aug 26, 2021
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE SENSOR, POSITION SENSOR DEVICE, LITHOGRAPHY SYSTEM, AND METHO...
- Publication number 20200363731
- Publication date Nov 19, 2020
- Carl Zeiss SMT GMBH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL DEVICE FOR PROJECTION LITHOGRAPHY
- Publication number 20200341384
- Publication date Oct 29, 2020
- Carl Zeiss SMT GMBH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL ELEMENT FOR PROJECTION LITHOGRAPHY
- Publication number 20200341385
- Publication date Oct 29, 2020
- Carl Zeiss SMT GMBH
- Stig Bieling
- G02 - OPTICS
Information Patent Application
PUPIL FACET MIRROR, ILLUMINATION OPTICS AND OPTICAL SYSTEM FOR A PR...
- Publication number 20200333712
- Publication date Oct 22, 2020
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20200166852
- Publication date May 28, 2020
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROLITHOGRAPHIC ILLUMINATION UNIT
- Publication number 20190113849
- Publication date Apr 18, 2019
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POLARIZATION-MODULATING OPTICAL ELEMENT
- Publication number 20190094704
- Publication date Mar 28, 2019
- Carl Zeiss SMT GMBH
- Damian Fiolka
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING A MASK FOR MICROLITHOGRAPHY
- Publication number 20190011839
- Publication date Jan 10, 2019
- Carl Zeiss SMT GMBH
- Holger Seitz
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20180335702
- Publication date Nov 22, 2018
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20180314165
- Publication date Nov 1, 2018
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION DEVICE AND ME...
- Publication number 20180284622
- Publication date Oct 4, 2018
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20180246415
- Publication date Aug 30, 2018
- Carl Zeiss SMT GMBH
- Stefan Xalter
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
METHOD OF OPERATING A MICROLITHOGRAPHIC PROJECTION APPARATUS AND IL...
- Publication number 20180217506
- Publication date Aug 2, 2018
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
LIGHTING SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM A...
- Publication number 20180129137
- Publication date May 10, 2018
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20180059551
- Publication date Mar 1, 2018
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20170351183
- Publication date Dec 7, 2017
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POLARIZATION-MODULATING OPTICAL ELEMENT
- Publication number 20170329233
- Publication date Nov 16, 2017
- Carl Zeiss SMT GMBH
- Damian Fiolka
- G02 - OPTICS
Information Patent Application
OPTICAL WAVEGUIDE FOR GUIDING ILLUMINATION LIGHT
- Publication number 20170261680
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Christian Wald
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20170261861
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20170255110
- Publication date Sep 7, 2017
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20170192361
- Publication date Jul 6, 2017
- Carl Zeiss SMT GMBH
- Axel Scholz
- G02 - OPTICS
Information Patent Application
FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOG...
- Publication number 20170176865
- Publication date Jun 22, 2017
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20170160642
- Publication date Jun 8, 2017
- Carl Zeiss SMT GMBH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POLARIZATION-MODULATING OPTICAL ELEMENT
- Publication number 20170102622
- Publication date Apr 13, 2017
- Carl Zeiss SMT GMBH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY AND HOLLOW WAV...
- Publication number 20170102551
- Publication date Apr 13, 2017
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20170082928
- Publication date Mar 23, 2017
- Carl Zeiss SMT GMBH
- Markus DEGUENTHER
- G02 - OPTICS
Information Patent Application
ILLUMINATION APPARATUS FOR A PROJECTION EXPOSURE SYSTEM
- Publication number 20170082929
- Publication date Mar 23, 2017
- Carl Zeiss SMT GMBH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Markus Deguenther

Person

Patents Grantslast 30 patents

Apparatus and method for characterizing a microlithographic mask

Pupil facet mirror, illumination optics and optical system for a pr...

Image sensor, position sensor device, lithography system, and metho...

Pupil facet mirror, illumination optics and optical system for a pr...

Lithography apparatus comprising a plurality of individually contro...

Illumination optical device for projection lithography

Illumination optical element for projection lithography

Method and device for characterizing a mask for microlithography

Facet mirror

Illumination system of a microlithographic projection device and me...

Method of operating a microlithographic projection apparatus and il...

Microlithographic illumination unit

Illumination system of a microlithographic projection exposure appa...

Lighting system of a microlithographic projection exposure system a...

Optical waveguide for guiding illumination light

Illumination system having a beam deflection array for illuminating...

Facet mirror for an illumination optical unit for projection lithog...

Illumination system for illuminating a mask in a microlithographic...

Illumination optical unit for projection lithography and hollow wav...

Microlithographic projection exposure apparatus having a multi-mirr...

Optical component

Illumination system for microlithography

Beam distributing optical device and associated unit, system and ap...

Illumination optical unit for EUV projection lithography

Optical system of a microlithographic projection exposure apparatus

Projection exposure apparatus and method for controlling a projecti...

Illumination system of a microlithographic projection exposure appa...

Illumination system for illuminating a mask in a microlithographic...

Lighting system of a microlithographic projection exposure system a...

Optical system for a microlithographic projection exposure apparatu...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

PUPIL FACET MIRROR, ILLUMINATION OPTICS AND OPTICAL SYSTEM FOR A PR...

IMAGE SENSOR, POSITION SENSOR DEVICE, LITHOGRAPHY SYSTEM, AND METHO...

ILLUMINATION OPTICAL DEVICE FOR PROJECTION LITHOGRAPHY

ILLUMINATION OPTICAL ELEMENT FOR PROJECTION LITHOGRAPHY

PUPIL FACET MIRROR, ILLUMINATION OPTICS AND OPTICAL SYSTEM FOR A PR...

LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...

MICROLITHOGRAPHIC ILLUMINATION UNIT

POLARIZATION-MODULATING OPTICAL ELEMENT

METHOD AND DEVICE FOR CHARACTERIZING A MASK FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION DEVICE AND ME...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

METHOD OF OPERATING A MICROLITHOGRAPHIC PROJECTION APPARATUS AND IL...

LIGHTING SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM A...

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

POLARIZATION-MODULATING OPTICAL ELEMENT

OPTICAL WAVEGUIDE FOR GUIDING ILLUMINATION LIGHT

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOG...

ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

POLARIZATION-MODULATING OPTICAL ELEMENT

ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY AND HOLLOW WAV...

OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

ILLUMINATION APPARATUS FOR A PROJECTION EXPOSURE SYSTEM