Markus Deufel

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Aachen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for deposition of a III-V semiconductor layer
- Patent number 11,286,566
- Issue date Mar 29, 2022
- Aixtron SE
- Francisco Ruda Y Witt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD reactor and method for cleaning a CVD reactor
- Patent number 10,883,171
- Issue date Jan 5, 2021
- Aixtron SE
- Marcel Kollberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for exhaust gas treatment on CVD reactor
- Patent number 10,329,668
- Issue date Jun 25, 2019
- Aixtron SE
- Patrick Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR DEPOSITION OF A III-V SEMICONDUCTOR LAYER
- Publication number 20190264323
- Publication date Aug 29, 2019
- AIXTRON SE
- Francisco RUDA Y WITT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR AND METHOD FOR CLEANING A CVD REACTOR
- Publication number 20190226082
- Publication date Jul 25, 2019
- AIXTRON SE
- Marcel KOLLBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF A III-V SEMICONDUCTOR LAYER
- Publication number 20160225619
- Publication date Aug 4, 2016
- AIXTRON SE
- Francisco RUDA Y WITT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR EXHAUST GAS TREATMENT ON CVD REACTOR
- Publication number 20150292083
- Publication date Oct 15, 2015
- AIXTRON SE
- Patrick Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...