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Markus Gigacher
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Klagenfurt, AT
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last 30 patents
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Patent Grant
Apparatus for wet treatment of plate-like articles
Patent number
8,888,952
Issue date
Nov 18, 2014
Lam Research AG
Markus Gigacher
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR WET TREATMENT OF PLATE-LIKE ARTICLES
Publication number
20100206481
Publication date
Aug 19, 2010
SEZ AG
Markus Gigacher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and Method For Liquid Treatment of Wafer-Shaped Articles
Publication number
20080196835
Publication date
Aug 21, 2008
SEZ AG
Andreas Baldy
H01 - BASIC ELECTRIC ELEMENTS