Markus Hagedorn

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Ulm, DE

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Patents Grantslast 30 patents

Information Patent Grant
Preheat processes for millisecond anneal system
- Patent number 12,027,427
- Issue date Jul 2, 2024
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Features for improving process uniformity in a millisecond anneal s...
- Patent number 10,770,309
- Issue date Sep 8, 2020
- Mattson Technology, Inc.
- Alexandr Cosceev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preheat processes for millisecond anneal system
- Patent number 10,727,140
- Issue date Jul 28, 2020
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20240304502
- Publication date Sep 12, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Features for Improving Process Uniformity in a Millisecond Anneal S...
- Publication number 20200402811
- Publication date Dec 24, 2020
- Mattson Technology, Inc.
- Alexandr Cosceev
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20200350217
- Publication date Nov 5, 2020
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Features for Improving Process Uniformity in a Millisecond Anneal S...
- Publication number 20170194163
- Publication date Jul 6, 2017
- Mattson Technology, Inc.
- Alexandr Cosceev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20170194220
- Publication date Jul 6, 2017
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS