Markus Holz

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for generating a mathematical model for positioning individu...
- Patent number 12,164,102
- Issue date Dec 10, 2024
- Carl Zeiss SMT GmbH
- Norman Kretzschmar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing an illumination system for an EUV projection e...
- Patent number 11,048,172
- Issue date Jun 29, 2021
- Carl Zeiss SMT GmbH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for operating an apparatus
- Patent number 10,838,307
- Issue date Nov 17, 2020
- Carl Zeiss SMT GmbH
- Markus Holz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control device
- Patent number 10,678,151
- Issue date Jun 9, 2020
- Carl Zeiss SMT GmbH
- Markus Holz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor arrangement for a lithography system, lithography system, an...
- Patent number 10,514,619
- Issue date Dec 24, 2019
- Carl Zeiss SMT GmbH
- Ulrich Bihr
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing an illumination system for an EUV projection e...
- Patent number 10,514,608
- Issue date Dec 24, 2019
- Carl Zeiss SMT GmbH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and method for operating a lithography apparatus
- Patent number 10,261,424
- Issue date Apr 16, 2019
- Carl Zeiss SMT GmbH
- Udo Dinger
- G02 - OPTICS
Information Patent Grant
Mirror device
- Patent number 10,101,507
- Issue date Oct 16, 2018
- Carl Zeiss SMT GmbH
- Yanko Sarov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for controlling positioning of multiple adjustabl...
- Patent number 10,018,803
- Issue date Jul 10, 2018
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for determining a tilt angle of at least one mirror of a lit...
- Patent number 10,007,195
- Issue date Jun 26, 2018
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical component
- Patent number 9,851,555
- Issue date Dec 26, 2017
- Carl Zeiss SMT GmbH
- Markus Holz
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR GENERATING A MATHEMATICAL MODEL FOR POSITIONING INDIVIDU...
- Publication number 20220066196
- Publication date Mar 3, 2022
- Carl Zeiss SMT GMBH
- Norman KRETZSCHMAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...
- Publication number 20200110340
- Publication date Apr 9, 2020
- Carl Zeiss SMT GMBH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR OPERATING AN APPARATUS
- Publication number 20190346772
- Publication date Nov 14, 2019
- Carl Zeiss SMT GMBH
- Markus Holz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL DEVICE
- Publication number 20190187574
- Publication date Jun 20, 2019
- Carl Zeiss SMT GMBH
- Markus Holz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...
- Publication number 20180373158
- Publication date Dec 27, 2018
- Carl Zeiss SMT GMBH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR ARRANGEMENT FOR A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM, AN...
- Publication number 20180188656
- Publication date Jul 5, 2018
- Ulrich Bihr
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD FOR OPERATING A LITHOGRAPHY APPARATUS
- Publication number 20180107122
- Publication date Apr 19, 2018
- Carl Zeiss SMT GMBH
- Udo Dinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR DEVICE
- Publication number 20170276842
- Publication date Sep 28, 2017
- Carl Zeiss SMT GMBH
- Yanko Sarov
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR CONTROLLING POSITIONING OF MULTIPLE ADJUSTABL...
- Publication number 20170038555
- Publication date Feb 9, 2017
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
DEVICE FOR DETERMINING A TILT ANGLE OF AT LEAST ONE MIRROR OF A LIT...
- Publication number 20160246186
- Publication date Aug 25, 2016
- Carl Zeiss SMT GMBH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL COMPONENT
- Publication number 20160170201
- Publication date Jun 16, 2016
- Carl Zeiss SMT GMBH
- Markus Holz
- G02 - OPTICS

Markus Holz

Person

Patents Grantslast 30 patents

Method for generating a mathematical model for positioning individu...

Method for producing an illumination system for an EUV projection e...

Apparatus and method for operating an apparatus

Control device

Sensor arrangement for a lithography system, lithography system, an...

Method for producing an illumination system for an EUV projection e...

Lithography apparatus and method for operating a lithography apparatus

Mirror device

Device and method for controlling positioning of multiple adjustabl...

Device for determining a tilt angle of at least one mirror of a lit...

Optical component

Patents Applicationslast 30 patents

METHOD FOR GENERATING A MATHEMATICAL MODEL FOR POSITIONING INDIVIDU...

METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...

APPARATUS AND METHOD FOR OPERATING AN APPARATUS

CONTROL DEVICE

METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...

SENSOR ARRANGEMENT FOR A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM, AN...

LITHOGRAPHY APPARATUS AND METHOD FOR OPERATING A LITHOGRAPHY APPARATUS

MIRROR DEVICE

DEVICE AND METHOD FOR CONTROLLING POSITIONING OF MULTIPLE ADJUSTABL...

DEVICE FOR DETERMINING A TILT ANGLE OF AT LEAST ONE MIRROR OF A LIT...

OPTICAL COMPONENT